1/18/2011	12:12:16 AM	Helium valve closed
1/18/2011	12:12:16 AM	H2 valve closed
1/18/2011	12:12:16 AM	BCl3 valve closed
1/18/2011	12:12:16 AM	PH3 valve closed
1/18/2011	12:12:16 AM	SiCl4 pre valve closed
1/18/2011	12:12:16 AM	SiCl4 post valve closed
1/18/2011	12:12:16 AM	Main Vac valve closed
1/18/2011	12:12:16 AM	Bypass valve closed
1/18/2011	12:12:16 AM	Bubbler valve closed
1/18/2011	12:12:16 AM	Helium MFC set to  0.000000
1/18/2011	12:12:16 AM	H2 MFC set to  0.000000
1/18/2011	12:12:16 AM	BCl3 MFC set to  0.000000
1/18/2011	12:12:16 AM	PHl3 MFC set to  0.000000
1/18/2011	12:12:16 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:12:16 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:12:16 AM	Tube furnace set to 0
1/18/2011	12:12:16 AM	Run finished at 12:12 AM
1/18/2011	12:48:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	12:48:56 AM	Recipe started at 12:48 AM
1/18/2011	12:48:56 AM	Helium valve closed
1/18/2011	12:48:56 AM	H2 valve closed
1/18/2011	12:48:56 AM	BCl3 valve closed
1/18/2011	12:48:56 AM	PH3 valve closed
1/18/2011	12:48:56 AM	SiCl4 pre valve closed
1/18/2011	12:48:56 AM	SiCl4 post valve closed
1/18/2011	12:48:56 AM	Main Vac valve closed
1/18/2011	12:48:56 AM	Bubbler valve closed
1/18/2011	12:48:56 AM	Bypass valve opened
1/18/2011	12:48:56 AM	Helium MFC set to  0.000000
1/18/2011	12:48:56 AM	H2 MFC set to  0.000000
1/18/2011	12:48:56 AM	BCl3 MFC set to  0.000000
1/18/2011	12:48:56 AM	PHl3 MFC set to  0.000000
1/18/2011	12:48:56 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:48:56 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:48:56 AM	Tube furnace set to 0
1/18/2011	12:49:29 AM	Helium valve closed
1/18/2011	12:49:29 AM	H2 valve closed
1/18/2011	12:49:29 AM	BCl3 valve closed
1/18/2011	12:49:29 AM	PH3 valve closed
1/18/2011	12:49:29 AM	SiCl4 pre valve closed
1/18/2011	12:49:29 AM	SiCl4 post valve closed
1/18/2011	12:49:29 AM	Bubbler valve closed
1/18/2011	12:49:29 AM	Main Vac valve opened
1/18/2011	12:49:29 AM	Bypass valve opened
1/18/2011	12:49:29 AM	Helium MFC set to  0.000000
1/18/2011	12:49:29 AM	H2 MFC set to  0.000000
1/18/2011	12:49:29 AM	BCl3 MFC set to  0.000000
1/18/2011	12:49:29 AM	PHl3 MFC set to  0.000000
1/18/2011	12:49:29 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:49:29 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:49:29 AM	Tube furnace set to 0
1/18/2011	12:49:29 AM	Run finished at 12:49 AM
1/18/2011	12:49:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	12:50:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	12:50:50 AM	Recipe started at 12:50 AM
1/18/2011	12:50:50 AM	Helium valve closed
1/18/2011	12:50:50 AM	H2 valve closed
1/18/2011	12:50:50 AM	BCl3 valve closed
1/18/2011	12:50:50 AM	PH3 valve closed
1/18/2011	12:50:50 AM	SiCl4 pre valve closed
1/18/2011	12:50:50 AM	SiCl4 post valve closed
1/18/2011	12:50:50 AM	Main Vac valve closed
1/18/2011	12:50:50 AM	Bubbler valve closed
1/18/2011	12:50:50 AM	Bypass valve opened
1/18/2011	12:50:50 AM	Helium MFC set to  0.000000
1/18/2011	12:50:50 AM	H2 MFC set to  0.000000
1/18/2011	12:50:50 AM	BCl3 MFC set to  0.000000
1/18/2011	12:50:50 AM	PHl3 MFC set to  0.000000
1/18/2011	12:50:50 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:50:50 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:50:51 AM	Tube furnace set to 0
1/18/2011	12:50:51 AM	Helium valve closed
1/18/2011	12:50:51 AM	H2 valve closed
1/18/2011	12:50:51 AM	BCl3 valve closed
1/18/2011	12:50:51 AM	PH3 valve closed
1/18/2011	12:50:51 AM	SiCl4 pre valve closed
1/18/2011	12:50:51 AM	SiCl4 post valve closed
1/18/2011	12:50:51 AM	Bubbler valve closed
1/18/2011	12:50:51 AM	Main Vac valve opened
1/18/2011	12:50:51 AM	Bypass valve opened
1/18/2011	12:50:51 AM	Helium MFC set to  0.000000
1/18/2011	12:50:51 AM	H2 MFC set to  0.000000
1/18/2011	12:50:51 AM	BCl3 MFC set to  0.000000
1/18/2011	12:50:51 AM	PHl3 MFC set to  0.000000
1/18/2011	12:50:51 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:50:51 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:50:51 AM	Tube furnace set to 0
1/18/2011	12:50:51 AM	Run finished at 12:50 AM
1/18/2011	12:50:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	12:50:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	12:51:07 AM	Recipe started at 12:50 AM
1/18/2011	12:51:07 AM	Helium valve closed
1/18/2011	12:51:07 AM	H2 valve closed
1/18/2011	12:51:07 AM	BCl3 valve closed
1/18/2011	12:51:07 AM	PH3 valve closed
1/18/2011	12:51:07 AM	SiCl4 pre valve closed
1/18/2011	12:51:07 AM	SiCl4 post valve closed
1/18/2011	12:51:07 AM	Main Vac valve closed
1/18/2011	12:51:07 AM	Bubbler valve closed
1/18/2011	12:51:07 AM	Bypass valve opened
1/18/2011	12:51:07 AM	Helium MFC set to  0.000000
1/18/2011	12:51:07 AM	H2 MFC set to  0.000000
1/18/2011	12:51:07 AM	BCl3 MFC set to  0.000000
1/18/2011	12:51:07 AM	PHl3 MFC set to  0.000000
1/18/2011	12:51:07 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:51:07 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:51:07 AM	Tube furnace set to 0
1/18/2011	12:51:07 AM	Helium valve closed
1/18/2011	12:51:07 AM	H2 valve closed
1/18/2011	12:51:07 AM	BCl3 valve closed
1/18/2011	12:51:07 AM	PH3 valve closed
1/18/2011	12:51:07 AM	SiCl4 pre valve closed
1/18/2011	12:51:07 AM	SiCl4 post valve closed
1/18/2011	12:51:07 AM	Bubbler valve closed
1/18/2011	12:51:07 AM	Main Vac valve opened
1/18/2011	12:51:07 AM	Bypass valve opened
1/18/2011	12:51:07 AM	Helium MFC set to  0.000000
1/18/2011	12:51:07 AM	H2 MFC set to  0.000000
1/18/2011	12:51:07 AM	BCl3 MFC set to  0.000000
1/18/2011	12:51:07 AM	PHl3 MFC set to  0.000000
1/18/2011	12:51:07 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:51:07 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:51:07 AM	Tube furnace set to 0
1/18/2011	12:51:22 AM	H2 valve closed
1/18/2011	12:51:22 AM	BCl3 valve closed
1/18/2011	12:51:22 AM	PH3 valve closed
1/18/2011	12:51:22 AM	SiCl4 pre valve closed
1/18/2011	12:51:22 AM	SiCl4 post valve closed
1/18/2011	12:51:22 AM	Bubbler valve closed
1/18/2011	12:51:22 AM	Helium valve opened
1/18/2011	12:51:22 AM	Main Vac valve opened
1/18/2011	12:51:22 AM	Bypass valve opened
1/18/2011	12:51:22 AM	Helium MFC set to  100.000000
1/18/2011	12:51:22 AM	H2 MFC set to  0.000000
1/18/2011	12:51:22 AM	BCl3 MFC set to  0.000000
1/18/2011	12:51:22 AM	PHl3 MFC set to  0.000000
1/18/2011	12:51:22 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:51:22 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:51:22 AM	Tube furnace set to 0
1/18/2011	12:52:22 AM	Helium valve closed
1/18/2011	12:52:22 AM	H2 valve closed
1/18/2011	12:52:22 AM	BCl3 valve closed
1/18/2011	12:52:22 AM	PH3 valve closed
1/18/2011	12:52:22 AM	SiCl4 pre valve closed
1/18/2011	12:52:22 AM	SiCl4 post valve closed
1/18/2011	12:52:22 AM	Bubbler valve closed
1/18/2011	12:52:22 AM	Main Vac valve opened
1/18/2011	12:52:22 AM	Bypass valve opened
1/18/2011	12:52:22 AM	Helium MFC set to  0.000000
1/18/2011	12:52:22 AM	H2 MFC set to  0.000000
1/18/2011	12:52:22 AM	BCl3 MFC set to  0.000000
1/18/2011	12:52:22 AM	PHl3 MFC set to  0.000000
1/18/2011	12:52:22 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:52:22 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:52:22 AM	Tube furnace set to 0
1/18/2011	12:53:22 AM	H2 valve closed
1/18/2011	12:53:22 AM	BCl3 valve closed
1/18/2011	12:53:22 AM	PH3 valve closed
1/18/2011	12:53:22 AM	SiCl4 pre valve closed
1/18/2011	12:53:22 AM	SiCl4 post valve closed
1/18/2011	12:53:22 AM	Bubbler valve closed
1/18/2011	12:53:23 AM	Helium valve opened
1/18/2011	12:53:23 AM	Main Vac valve opened
1/18/2011	12:53:23 AM	Bypass valve opened
1/18/2011	12:53:23 AM	Helium MFC set to  100.000000
1/18/2011	12:53:23 AM	H2 MFC set to  0.000000
1/18/2011	12:53:23 AM	BCl3 MFC set to  0.000000
1/18/2011	12:53:23 AM	PHl3 MFC set to  0.000000
1/18/2011	12:53:23 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:53:23 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:53:23 AM	Tube furnace set to 0
1/18/2011	12:54:23 AM	Helium valve closed
1/18/2011	12:54:23 AM	H2 valve closed
1/18/2011	12:54:23 AM	BCl3 valve closed
1/18/2011	12:54:23 AM	PH3 valve closed
1/18/2011	12:54:23 AM	SiCl4 pre valve closed
1/18/2011	12:54:23 AM	SiCl4 post valve closed
1/18/2011	12:54:23 AM	Bubbler valve closed
1/18/2011	12:54:23 AM	Main Vac valve opened
1/18/2011	12:54:23 AM	Bypass valve opened
1/18/2011	12:54:23 AM	Helium MFC set to  0.000000
1/18/2011	12:54:23 AM	H2 MFC set to  0.000000
1/18/2011	12:54:23 AM	BCl3 MFC set to  0.000000
1/18/2011	12:54:23 AM	PHl3 MFC set to  0.000000
1/18/2011	12:54:23 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:54:23 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:54:23 AM	Tube furnace set to 0
1/18/2011	12:55:23 AM	H2 valve closed
1/18/2011	12:55:23 AM	BCl3 valve closed
1/18/2011	12:55:23 AM	PH3 valve closed
1/18/2011	12:55:23 AM	SiCl4 pre valve closed
1/18/2011	12:55:23 AM	SiCl4 post valve closed
1/18/2011	12:55:23 AM	Bubbler valve closed
1/18/2011	12:55:23 AM	Helium valve opened
1/18/2011	12:55:23 AM	Main Vac valve opened
1/18/2011	12:55:23 AM	Bypass valve opened
1/18/2011	12:55:23 AM	Helium MFC set to  100.000000
1/18/2011	12:55:23 AM	H2 MFC set to  0.000000
1/18/2011	12:55:23 AM	BCl3 MFC set to  0.000000
1/18/2011	12:55:23 AM	PHl3 MFC set to  0.000000
1/18/2011	12:55:23 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:55:23 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:55:23 AM	Tube furnace set to 0
1/18/2011	12:56:23 AM	Helium valve closed
1/18/2011	12:56:23 AM	H2 valve closed
1/18/2011	12:56:23 AM	BCl3 valve closed
1/18/2011	12:56:23 AM	PH3 valve closed
1/18/2011	12:56:23 AM	SiCl4 pre valve closed
1/18/2011	12:56:23 AM	SiCl4 post valve closed
1/18/2011	12:56:23 AM	Bubbler valve closed
1/18/2011	12:56:23 AM	Main Vac valve opened
1/18/2011	12:56:23 AM	Bypass valve opened
1/18/2011	12:56:23 AM	Helium MFC set to  0.000000
1/18/2011	12:56:23 AM	H2 MFC set to  0.000000
1/18/2011	12:56:23 AM	BCl3 MFC set to  0.000000
1/18/2011	12:56:23 AM	PHl3 MFC set to  0.000000
1/18/2011	12:56:23 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:56:23 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:56:23 AM	Tube furnace set to 0
1/18/2011	12:57:23 AM	H2 valve closed
1/18/2011	12:57:23 AM	BCl3 valve closed
1/18/2011	12:57:23 AM	PH3 valve closed
1/18/2011	12:57:23 AM	SiCl4 pre valve closed
1/18/2011	12:57:23 AM	SiCl4 post valve closed
1/18/2011	12:57:23 AM	Bubbler valve closed
1/18/2011	12:57:23 AM	Helium valve opened
1/18/2011	12:57:23 AM	Main Vac valve opened
1/18/2011	12:57:23 AM	Bypass valve opened
1/18/2011	12:57:23 AM	Helium MFC set to  100.000000
1/18/2011	12:57:23 AM	H2 MFC set to  0.000000
1/18/2011	12:57:23 AM	BCl3 MFC set to  0.000000
1/18/2011	12:57:23 AM	PHl3 MFC set to  0.000000
1/18/2011	12:57:23 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:57:23 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:57:23 AM	Tube furnace set to 0
1/18/2011	12:58:24 AM	Helium valve closed
1/18/2011	12:58:24 AM	H2 valve closed
1/18/2011	12:58:24 AM	BCl3 valve closed
1/18/2011	12:58:24 AM	PH3 valve closed
1/18/2011	12:58:24 AM	SiCl4 pre valve closed
1/18/2011	12:58:24 AM	SiCl4 post valve closed
1/18/2011	12:58:24 AM	Bubbler valve closed
1/18/2011	12:58:24 AM	Main Vac valve opened
1/18/2011	12:58:24 AM	Bypass valve opened
1/18/2011	12:58:24 AM	Helium MFC set to  0.000000
1/18/2011	12:58:24 AM	H2 MFC set to  0.000000
1/18/2011	12:58:24 AM	BCl3 MFC set to  0.000000
1/18/2011	12:58:24 AM	PHl3 MFC set to  0.000000
1/18/2011	12:58:24 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:58:24 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:58:24 AM	Tube furnace set to 0
1/18/2011	12:59:24 AM	H2 valve closed
1/18/2011	12:59:24 AM	BCl3 valve closed
1/18/2011	12:59:24 AM	PH3 valve closed
1/18/2011	12:59:24 AM	SiCl4 pre valve closed
1/18/2011	12:59:24 AM	SiCl4 post valve closed
1/18/2011	12:59:24 AM	Bubbler valve closed
1/18/2011	12:59:24 AM	Helium valve opened
1/18/2011	12:59:24 AM	Main Vac valve opened
1/18/2011	12:59:24 AM	Bypass valve opened
1/18/2011	12:59:24 AM	Helium MFC set to  100.000000
1/18/2011	12:59:24 AM	H2 MFC set to  0.000000
1/18/2011	12:59:24 AM	BCl3 MFC set to  0.000000
1/18/2011	12:59:24 AM	PHl3 MFC set to  0.000000
1/18/2011	12:59:24 AM	SiCl4 MFC set to  0.000000
1/18/2011	12:59:24 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	12:59:24 AM	Tube furnace set to 0
1/18/2011	1:00:24 AM	Helium valve closed
1/18/2011	1:00:24 AM	H2 valve closed
1/18/2011	1:00:24 AM	BCl3 valve closed
1/18/2011	1:00:24 AM	PH3 valve closed
1/18/2011	1:00:24 AM	SiCl4 pre valve closed
1/18/2011	1:00:24 AM	SiCl4 post valve closed
1/18/2011	1:00:24 AM	Bubbler valve closed
1/18/2011	1:00:24 AM	Main Vac valve opened
1/18/2011	1:00:24 AM	Bypass valve opened
1/18/2011	1:00:24 AM	Helium MFC set to  0.000000
1/18/2011	1:00:24 AM	H2 MFC set to  0.000000
1/18/2011	1:00:24 AM	BCl3 MFC set to  0.000000
1/18/2011	1:00:24 AM	PHl3 MFC set to  0.000000
1/18/2011	1:00:24 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:00:24 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:00:24 AM	Tube furnace set to 0
1/18/2011	1:01:24 AM	H2 valve closed
1/18/2011	1:01:24 AM	BCl3 valve closed
1/18/2011	1:01:24 AM	PH3 valve closed
1/18/2011	1:01:24 AM	SiCl4 pre valve closed
1/18/2011	1:01:24 AM	SiCl4 post valve closed
1/18/2011	1:01:24 AM	Bubbler valve closed
1/18/2011	1:01:24 AM	Helium valve opened
1/18/2011	1:01:24 AM	Main Vac valve opened
1/18/2011	1:01:24 AM	Bypass valve opened
1/18/2011	1:01:24 AM	Helium MFC set to  100.000000
1/18/2011	1:01:24 AM	H2 MFC set to  0.000000
1/18/2011	1:01:24 AM	BCl3 MFC set to  0.000000
1/18/2011	1:01:24 AM	PHl3 MFC set to  0.000000
1/18/2011	1:01:24 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:01:24 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:01:24 AM	Tube furnace set to 0
1/18/2011	1:02:24 AM	Helium valve closed
1/18/2011	1:02:24 AM	H2 valve closed
1/18/2011	1:02:24 AM	BCl3 valve closed
1/18/2011	1:02:24 AM	PH3 valve closed
1/18/2011	1:02:24 AM	SiCl4 pre valve closed
1/18/2011	1:02:24 AM	SiCl4 post valve closed
1/18/2011	1:02:24 AM	Bubbler valve closed
1/18/2011	1:02:24 AM	Main Vac valve opened
1/18/2011	1:02:24 AM	Bypass valve opened
1/18/2011	1:02:24 AM	Helium MFC set to  0.000000
1/18/2011	1:02:24 AM	H2 MFC set to  0.000000
1/18/2011	1:02:24 AM	BCl3 MFC set to  0.000000
1/18/2011	1:02:24 AM	PHl3 MFC set to  0.000000
1/18/2011	1:02:24 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:02:24 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:02:24 AM	Tube furnace set to 0
1/18/2011	1:03:25 AM	H2 valve closed
1/18/2011	1:03:25 AM	BCl3 valve closed
1/18/2011	1:03:25 AM	PH3 valve closed
1/18/2011	1:03:25 AM	SiCl4 pre valve closed
1/18/2011	1:03:25 AM	SiCl4 post valve closed
1/18/2011	1:03:25 AM	Bubbler valve closed
1/18/2011	1:03:25 AM	Helium valve opened
1/18/2011	1:03:25 AM	Main Vac valve opened
1/18/2011	1:03:25 AM	Bypass valve opened
1/18/2011	1:03:25 AM	Helium MFC set to  100.000000
1/18/2011	1:03:25 AM	H2 MFC set to  0.000000
1/18/2011	1:03:25 AM	BCl3 MFC set to  0.000000
1/18/2011	1:03:25 AM	PHl3 MFC set to  0.000000
1/18/2011	1:03:25 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:03:25 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:03:25 AM	Tube furnace set to 0
1/18/2011	1:04:25 AM	Helium valve closed
1/18/2011	1:04:25 AM	H2 valve closed
1/18/2011	1:04:25 AM	BCl3 valve closed
1/18/2011	1:04:25 AM	PH3 valve closed
1/18/2011	1:04:25 AM	SiCl4 pre valve closed
1/18/2011	1:04:25 AM	SiCl4 post valve closed
1/18/2011	1:04:25 AM	Bubbler valve closed
1/18/2011	1:04:25 AM	Main Vac valve opened
1/18/2011	1:04:25 AM	Bypass valve opened
1/18/2011	1:04:25 AM	Helium MFC set to  0.000000
1/18/2011	1:04:25 AM	H2 MFC set to  0.000000
1/18/2011	1:04:25 AM	BCl3 MFC set to  0.000000
1/18/2011	1:04:25 AM	PHl3 MFC set to  0.000000
1/18/2011	1:04:25 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:04:25 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:04:25 AM	Tube furnace set to 0
1/18/2011	1:05:25 AM	H2 valve closed
1/18/2011	1:05:25 AM	BCl3 valve closed
1/18/2011	1:05:25 AM	PH3 valve closed
1/18/2011	1:05:25 AM	SiCl4 pre valve closed
1/18/2011	1:05:25 AM	SiCl4 post valve closed
1/18/2011	1:05:25 AM	Bubbler valve closed
1/18/2011	1:05:25 AM	Helium valve opened
1/18/2011	1:05:25 AM	Main Vac valve opened
1/18/2011	1:05:25 AM	Bypass valve opened
1/18/2011	1:05:25 AM	Helium MFC set to  100.000000
1/18/2011	1:05:25 AM	H2 MFC set to  0.000000
1/18/2011	1:05:25 AM	BCl3 MFC set to  0.000000
1/18/2011	1:05:25 AM	PHl3 MFC set to  0.000000
1/18/2011	1:05:25 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:05:25 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:05:25 AM	Tube furnace set to 0
1/18/2011	1:06:25 AM	Helium valve closed
1/18/2011	1:06:25 AM	H2 valve closed
1/18/2011	1:06:25 AM	BCl3 valve closed
1/18/2011	1:06:25 AM	PH3 valve closed
1/18/2011	1:06:25 AM	SiCl4 pre valve closed
1/18/2011	1:06:25 AM	SiCl4 post valve closed
1/18/2011	1:06:25 AM	Bubbler valve closed
1/18/2011	1:06:25 AM	Main Vac valve opened
1/18/2011	1:06:25 AM	Bypass valve opened
1/18/2011	1:06:25 AM	Helium MFC set to  0.000000
1/18/2011	1:06:25 AM	H2 MFC set to  0.000000
1/18/2011	1:06:25 AM	BCl3 MFC set to  0.000000
1/18/2011	1:06:25 AM	PHl3 MFC set to  0.000000
1/18/2011	1:06:25 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:06:25 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:06:25 AM	Tube furnace set to 0
1/18/2011	1:07:25 AM	H2 valve closed
1/18/2011	1:07:25 AM	BCl3 valve closed
1/18/2011	1:07:25 AM	PH3 valve closed
1/18/2011	1:07:25 AM	SiCl4 pre valve closed
1/18/2011	1:07:25 AM	SiCl4 post valve closed
1/18/2011	1:07:25 AM	Bubbler valve closed
1/18/2011	1:07:25 AM	Helium valve opened
1/18/2011	1:07:25 AM	Main Vac valve opened
1/18/2011	1:07:25 AM	Bypass valve opened
1/18/2011	1:07:25 AM	Helium MFC set to  100.000000
1/18/2011	1:07:25 AM	H2 MFC set to  0.000000
1/18/2011	1:07:25 AM	BCl3 MFC set to  0.000000
1/18/2011	1:07:25 AM	PHl3 MFC set to  0.000000
1/18/2011	1:07:25 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:07:25 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:07:26 AM	Tube furnace set to 0
1/18/2011	1:08:26 AM	Helium valve closed
1/18/2011	1:08:26 AM	H2 valve closed
1/18/2011	1:08:26 AM	BCl3 valve closed
1/18/2011	1:08:26 AM	PH3 valve closed
1/18/2011	1:08:26 AM	SiCl4 pre valve closed
1/18/2011	1:08:26 AM	SiCl4 post valve closed
1/18/2011	1:08:26 AM	Bubbler valve closed
1/18/2011	1:08:26 AM	Main Vac valve opened
1/18/2011	1:08:26 AM	Bypass valve opened
1/18/2011	1:08:26 AM	Helium MFC set to  0.000000
1/18/2011	1:08:26 AM	H2 MFC set to  0.000000
1/18/2011	1:08:26 AM	BCl3 MFC set to  0.000000
1/18/2011	1:08:26 AM	PHl3 MFC set to  0.000000
1/18/2011	1:08:26 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:08:26 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:08:26 AM	Tube furnace set to 0
1/18/2011	1:09:26 AM	H2 valve closed
1/18/2011	1:09:26 AM	BCl3 valve closed
1/18/2011	1:09:26 AM	PH3 valve closed
1/18/2011	1:09:26 AM	SiCl4 pre valve closed
1/18/2011	1:09:26 AM	SiCl4 post valve closed
1/18/2011	1:09:26 AM	Bubbler valve closed
1/18/2011	1:09:26 AM	Helium valve opened
1/18/2011	1:09:26 AM	Main Vac valve opened
1/18/2011	1:09:26 AM	Bypass valve opened
1/18/2011	1:09:26 AM	Helium MFC set to  100.000000
1/18/2011	1:09:26 AM	H2 MFC set to  0.000000
1/18/2011	1:09:26 AM	BCl3 MFC set to  0.000000
1/18/2011	1:09:26 AM	PHl3 MFC set to  0.000000
1/18/2011	1:09:26 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:09:26 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:09:26 AM	Tube furnace set to 0
1/18/2011	1:10:26 AM	Helium valve closed
1/18/2011	1:10:26 AM	H2 valve closed
1/18/2011	1:10:26 AM	BCl3 valve closed
1/18/2011	1:10:26 AM	PH3 valve closed
1/18/2011	1:10:26 AM	SiCl4 pre valve closed
1/18/2011	1:10:26 AM	SiCl4 post valve closed
1/18/2011	1:10:26 AM	Bubbler valve closed
1/18/2011	1:10:26 AM	Main Vac valve opened
1/18/2011	1:10:26 AM	Bypass valve opened
1/18/2011	1:10:26 AM	Helium MFC set to  0.000000
1/18/2011	1:10:26 AM	H2 MFC set to  0.000000
1/18/2011	1:10:26 AM	BCl3 MFC set to  0.000000
1/18/2011	1:10:26 AM	PHl3 MFC set to  0.000000
1/18/2011	1:10:26 AM	SiCl4 MFC set to  0.000000
1/18/2011	1:10:26 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:10:26 AM	Tube furnace set to 0
1/18/2011	1:10:27 AM	Run finished at 1:10 AM
1/18/2011	1:10:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	9:06:48 AM	Helium MFC set to  100.000000
1/18/2011	9:06:49 AM	Helium valve opened
1/18/2011	9:08:24 AM	Helium valve closed
1/18/2011	9:10:19 AM	Recipe started at 9:10 AM
1/18/2011	9:10:19 AM	Helium valve closed
1/18/2011	9:10:19 AM	BCl3 valve closed
1/18/2011	9:10:19 AM	PH3 valve closed
1/18/2011	9:10:19 AM	SiCl4 pre valve closed
1/18/2011	9:10:19 AM	SiCl4 post valve closed
1/18/2011	9:10:19 AM	Main Vac valve closed
1/18/2011	9:10:19 AM	Bypass valve closed
1/18/2011	9:10:19 AM	Bubbler valve closed
1/18/2011	9:10:19 AM	H2 valve opened
1/18/2011	9:10:19 AM	Helium MFC set to  0.000000
1/18/2011	9:10:19 AM	H2 MFC set to  500.000000
1/18/2011	9:10:19 AM	BCl3 MFC set to  0.000000
1/18/2011	9:10:19 AM	PHl3 MFC set to  0.000000
1/18/2011	9:10:19 AM	SiCl4 MFC set to  0.000000
1/18/2011	9:10:19 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	9:10:19 AM	Tube furnace set to 0
1/18/2011	9:11:41 AM	Helium valve closed
1/18/2011	9:11:41 AM	BCl3 valve closed
1/18/2011	9:11:41 AM	PH3 valve closed
1/18/2011	9:11:41 AM	SiCl4 pre valve closed
1/18/2011	9:11:41 AM	SiCl4 post valve closed
1/18/2011	9:11:41 AM	Main Vac valve closed
1/18/2011	9:11:41 AM	Bypass valve closed
1/18/2011	9:11:41 AM	H2 valve opened
1/18/2011	9:11:41 AM	Bubbler valve opened
1/18/2011	9:11:41 AM	Helium MFC set to  0.000000
1/18/2011	9:11:41 AM	H2 MFC set to  500.000000
1/18/2011	9:11:41 AM	BCl3 MFC set to  0.000000
1/18/2011	9:11:41 AM	PHl3 MFC set to  0.000000
1/18/2011	9:11:41 AM	SiCl4 MFC set to  0.000000
1/18/2011	9:11:41 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	9:11:41 AM	Tube furnace set to 1000
1/18/2011	9:31:41 AM	Helium valve closed
1/18/2011	9:31:41 AM	PH3 valve closed
1/18/2011	9:31:41 AM	Main Vac valve closed
1/18/2011	9:31:41 AM	Bypass valve closed
1/18/2011	9:31:41 AM	H2 valve opened
1/18/2011	9:31:41 AM	BCl3 valve opened
1/18/2011	9:31:41 AM	SiCl4 pre valve opened
1/18/2011	9:31:41 AM	SiCl4 post valve opened
1/18/2011	9:31:41 AM	Bubbler valve opened
1/18/2011	9:31:41 AM	Helium MFC set to  0.000000
1/18/2011	9:31:41 AM	H2 MFC set to  500.000000
1/18/2011	9:31:41 AM	BCl3 MFC set to  2.000000
1/18/2011	9:31:41 AM	PHl3 MFC set to  0.000000
1/18/2011	9:31:41 AM	SiCl4 MFC set to  50.000000
1/18/2011	9:31:41 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	9:31:41 AM	Tube furnace set to 1000
1/18/2011	9:51:41 AM	H2 valve closed
1/18/2011	9:51:41 AM	BCl3 valve closed
1/18/2011	9:51:41 AM	PH3 valve closed
1/18/2011	9:51:41 AM	SiCl4 pre valve closed
1/18/2011	9:51:41 AM	SiCl4 post valve closed
1/18/2011	9:51:41 AM	Main Vac valve closed
1/18/2011	9:51:41 AM	Bypass valve closed
1/18/2011	9:51:41 AM	Helium valve opened
1/18/2011	9:51:41 AM	Bubbler valve opened
1/18/2011	9:51:41 AM	Helium MFC set to  500.000000
1/18/2011	9:51:41 AM	H2 MFC set to  0.000000
1/18/2011	9:51:41 AM	BCl3 MFC set to  0.000000
1/18/2011	9:51:41 AM	PHl3 MFC set to  0.000000
1/18/2011	9:51:41 AM	SiCl4 MFC set to  0.000000
1/18/2011	9:51:41 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	9:51:41 AM	Tube furnace set to 950
1/18/2011	9:56:41 AM	H2 valve closed
1/18/2011	9:56:41 AM	BCl3 valve closed
1/18/2011	9:56:41 AM	PH3 valve closed
1/18/2011	9:56:41 AM	SiCl4 pre valve closed
1/18/2011	9:56:41 AM	SiCl4 post valve closed
1/18/2011	9:56:41 AM	Main Vac valve closed
1/18/2011	9:56:41 AM	Bypass valve closed
1/18/2011	9:56:41 AM	Helium valve opened
1/18/2011	9:56:41 AM	Bubbler valve opened
1/18/2011	9:56:41 AM	Helium MFC set to  500.000000
1/18/2011	9:56:41 AM	H2 MFC set to  0.000000
1/18/2011	9:56:41 AM	BCl3 MFC set to  0.000000
1/18/2011	9:56:41 AM	PHl3 MFC set to  0.000000
1/18/2011	9:56:41 AM	SiCl4 MFC set to  0.000000
1/18/2011	9:56:41 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	9:56:42 AM	Tube furnace set to 900
1/18/2011	10:01:42 AM	H2 valve closed
1/18/2011	10:01:42 AM	BCl3 valve closed
1/18/2011	10:01:42 AM	PH3 valve closed
1/18/2011	10:01:42 AM	SiCl4 pre valve closed
1/18/2011	10:01:42 AM	SiCl4 post valve closed
1/18/2011	10:01:42 AM	Main Vac valve closed
1/18/2011	10:01:42 AM	Bypass valve closed
1/18/2011	10:01:42 AM	Helium valve opened
1/18/2011	10:01:42 AM	Bubbler valve opened
1/18/2011	10:01:42 AM	Helium MFC set to  500.000000
1/18/2011	10:01:42 AM	H2 MFC set to  0.000000
1/18/2011	10:01:42 AM	BCl3 MFC set to  0.000000
1/18/2011	10:01:42 AM	PHl3 MFC set to  0.000000
1/18/2011	10:01:42 AM	SiCl4 MFC set to  0.000000
1/18/2011	10:01:42 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	10:01:42 AM	Tube furnace set to 850
1/18/2011	10:06:42 AM	H2 valve closed
1/18/2011	10:06:42 AM	BCl3 valve closed
1/18/2011	10:06:42 AM	PH3 valve closed
1/18/2011	10:06:42 AM	SiCl4 pre valve closed
1/18/2011	10:06:42 AM	SiCl4 post valve closed
1/18/2011	10:06:42 AM	Main Vac valve closed
1/18/2011	10:06:42 AM	Bypass valve closed
1/18/2011	10:06:42 AM	Helium valve opened
1/18/2011	10:06:42 AM	Bubbler valve opened
1/18/2011	10:06:42 AM	Helium MFC set to  500.000000
1/18/2011	10:06:42 AM	H2 MFC set to  0.000000
1/18/2011	10:06:42 AM	BCl3 MFC set to  0.000000
1/18/2011	10:06:42 AM	PHl3 MFC set to  0.000000
1/18/2011	10:06:42 AM	SiCl4 MFC set to  0.000000
1/18/2011	10:06:42 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	10:06:42 AM	Tube furnace set to 800
1/18/2011	10:11:42 AM	H2 valve closed
1/18/2011	10:11:42 AM	BCl3 valve closed
1/18/2011	10:11:42 AM	PH3 valve closed
1/18/2011	10:11:42 AM	SiCl4 pre valve closed
1/18/2011	10:11:42 AM	SiCl4 post valve closed
1/18/2011	10:11:42 AM	Main Vac valve closed
1/18/2011	10:11:42 AM	Bypass valve closed
1/18/2011	10:11:42 AM	Helium valve opened
1/18/2011	10:11:42 AM	Bubbler valve opened
1/18/2011	10:11:42 AM	Helium MFC set to  500.000000
1/18/2011	10:11:42 AM	H2 MFC set to  0.000000
1/18/2011	10:11:42 AM	BCl3 MFC set to  0.000000
1/18/2011	10:11:42 AM	PHl3 MFC set to  0.000000
1/18/2011	10:11:42 AM	SiCl4 MFC set to  0.000000
1/18/2011	10:11:42 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	10:11:42 AM	Tube furnace set to 750
1/18/2011	10:16:42 AM	H2 valve closed
1/18/2011	10:16:42 AM	BCl3 valve closed
1/18/2011	10:16:42 AM	PH3 valve closed
1/18/2011	10:16:42 AM	SiCl4 pre valve closed
1/18/2011	10:16:42 AM	SiCl4 post valve closed
1/18/2011	10:16:42 AM	Main Vac valve closed
1/18/2011	10:16:42 AM	Bypass valve closed
1/18/2011	10:16:42 AM	Helium valve opened
1/18/2011	10:16:42 AM	Bubbler valve opened
1/18/2011	10:16:42 AM	Helium MFC set to  500.000000
1/18/2011	10:16:42 AM	H2 MFC set to  0.000000
1/18/2011	10:16:42 AM	BCl3 MFC set to  0.000000
1/18/2011	10:16:42 AM	PHl3 MFC set to  0.000000
1/18/2011	10:16:42 AM	SiCl4 MFC set to  0.000000
1/18/2011	10:16:42 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	10:16:42 AM	Tube furnace set to 700
1/18/2011	10:21:42 AM	H2 valve closed
1/18/2011	10:21:42 AM	BCl3 valve closed
1/18/2011	10:21:42 AM	PH3 valve closed
1/18/2011	10:21:42 AM	SiCl4 pre valve closed
1/18/2011	10:21:42 AM	SiCl4 post valve closed
1/18/2011	10:21:42 AM	Main Vac valve closed
1/18/2011	10:21:42 AM	Bypass valve closed
1/18/2011	10:21:42 AM	Helium valve opened
1/18/2011	10:21:42 AM	Bubbler valve opened
1/18/2011	10:21:42 AM	Helium MFC set to  500.000000
1/18/2011	10:21:42 AM	H2 MFC set to  0.000000
1/18/2011	10:21:42 AM	BCl3 MFC set to  0.000000
1/18/2011	10:21:42 AM	PHl3 MFC set to  0.000000
1/18/2011	10:21:42 AM	SiCl4 MFC set to  0.000000
1/18/2011	10:21:42 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	10:21:43 AM	Tube furnace set to 0
1/18/2011	10:41:43 AM	Helium valve closed
1/18/2011	10:41:43 AM	H2 valve closed
1/18/2011	10:41:43 AM	BCl3 valve closed
1/18/2011	10:41:43 AM	PH3 valve closed
1/18/2011	10:41:43 AM	SiCl4 pre valve closed
1/18/2011	10:41:43 AM	SiCl4 post valve closed
1/18/2011	10:41:43 AM	Main Vac valve closed
1/18/2011	10:41:43 AM	Bypass valve closed
1/18/2011	10:41:43 AM	Bubbler valve closed
1/18/2011	10:41:43 AM	Helium MFC set to  0.000000
1/18/2011	10:41:43 AM	H2 MFC set to  0.000000
1/18/2011	10:41:43 AM	BCl3 MFC set to  0.000000
1/18/2011	10:41:43 AM	PHl3 MFC set to  0.000000
1/18/2011	10:41:43 AM	SiCl4 MFC set to  0.000000
1/18/2011	10:41:43 AM	Bypass solenoid MFC set to  0.000000
1/18/2011	10:41:43 AM	Tube furnace set to 0
1/18/2011	10:41:43 AM	Run finished at 10:41 AM
1/18/2011	1:11:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/18/2011	1:11:32 PM	Recipe started at 1:11 PM
1/18/2011	1:11:32 PM	H2 valve closed
1/18/2011	1:11:32 PM	BCl3 valve closed
1/18/2011	1:11:32 PM	PH3 valve closed
1/18/2011	1:11:32 PM	SiCl4 pre valve closed
1/18/2011	1:11:32 PM	SiCl4 post valve closed
1/18/2011	1:11:32 PM	Main Vac valve closed
1/18/2011	1:11:32 PM	Bypass valve closed
1/18/2011	1:11:32 PM	Bubbler valve closed
1/18/2011	1:11:32 PM	Helium valve opened
1/18/2011	1:11:32 PM	Helium MFC set to  500.000000
1/18/2011	1:11:32 PM	H2 MFC set to  0.000000
1/18/2011	1:11:32 PM	BCl3 MFC set to  0.000000
1/18/2011	1:11:32 PM	PHl3 MFC set to  0.000000
1/18/2011	1:11:32 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:11:32 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:11:32 PM	Tube furnace set to 0
1/18/2011	1:11:39 PM	Helium valve closed
1/18/2011	1:11:39 PM	H2 valve closed
1/18/2011	1:11:39 PM	BCl3 valve closed
1/18/2011	1:11:39 PM	PH3 valve closed
1/18/2011	1:11:39 PM	SiCl4 pre valve closed
1/18/2011	1:11:39 PM	SiCl4 post valve closed
1/18/2011	1:11:39 PM	Main Vac valve closed
1/18/2011	1:11:39 PM	Bypass valve closed
1/18/2011	1:11:39 PM	Bubbler valve closed
1/18/2011	1:11:39 PM	Helium MFC set to  0.000000
1/18/2011	1:11:39 PM	H2 MFC set to  0.000000
1/18/2011	1:11:39 PM	BCl3 MFC set to  0.000000
1/18/2011	1:11:39 PM	PHl3 MFC set to  0.000000
1/18/2011	1:11:39 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:11:39 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:11:39 PM	Tube furnace set to 0
1/18/2011	1:11:39 PM	Run finished at 1:11 PM
1/18/2011	1:11:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/18/2011	1:22:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	1:22:53 PM	Recipe started at 1:22 PM
1/18/2011	1:22:53 PM	Helium valve closed
1/18/2011	1:22:53 PM	H2 valve closed
1/18/2011	1:22:53 PM	BCl3 valve closed
1/18/2011	1:22:53 PM	PH3 valve closed
1/18/2011	1:22:53 PM	SiCl4 pre valve closed
1/18/2011	1:22:53 PM	SiCl4 post valve closed
1/18/2011	1:22:53 PM	Main Vac valve closed
1/18/2011	1:22:53 PM	Bubbler valve closed
1/18/2011	1:22:53 PM	Bypass valve opened
1/18/2011	1:22:53 PM	Helium MFC set to  0.000000
1/18/2011	1:22:53 PM	H2 MFC set to  0.000000
1/18/2011	1:22:53 PM	BCl3 MFC set to  0.000000
1/18/2011	1:22:53 PM	PHl3 MFC set to  0.000000
1/18/2011	1:22:53 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:22:53 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:22:53 PM	Tube furnace set to 0
1/18/2011	1:23:26 PM	Helium valve closed
1/18/2011	1:23:26 PM	H2 valve closed
1/18/2011	1:23:26 PM	BCl3 valve closed
1/18/2011	1:23:26 PM	PH3 valve closed
1/18/2011	1:23:26 PM	SiCl4 pre valve closed
1/18/2011	1:23:26 PM	SiCl4 post valve closed
1/18/2011	1:23:26 PM	Bubbler valve closed
1/18/2011	1:23:26 PM	Main Vac valve opened
1/18/2011	1:23:26 PM	Bypass valve opened
1/18/2011	1:23:26 PM	Helium MFC set to  0.000000
1/18/2011	1:23:26 PM	H2 MFC set to  0.000000
1/18/2011	1:23:26 PM	BCl3 MFC set to  0.000000
1/18/2011	1:23:26 PM	PHl3 MFC set to  0.000000
1/18/2011	1:23:26 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:23:26 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:23:26 PM	Tube furnace set to 0
1/18/2011	1:23:27 PM	Run finished at 1:23 PM
1/18/2011	1:23:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	1:23:53 PM	Bypass valve closed
1/18/2011	1:23:54 PM	Main Vac valve closed
1/18/2011	1:24:11 PM	Bypass valve opened
1/18/2011	1:24:12 PM	Main Vac valve opened
1/18/2011	1:24:29 PM	Helium valve opened
1/18/2011	1:24:31 PM	Helium MFC set to  100.000000
1/18/2011	1:24:52 PM	Helium valve closed
1/18/2011	1:25:26 PM	Helium valve opened
1/18/2011	1:26:03 PM	Bypass valve closed
1/18/2011	1:26:03 PM	Main Vac valve closed
1/18/2011	1:26:21 PM	Helium valve closed
1/18/2011	1:26:24 PM	Main Vac valve opened
1/18/2011	1:26:25 PM	Bypass valve opened
1/18/2011	1:26:54 PM	Helium valve opened
1/18/2011	1:27:59 PM	Helium valve closed
1/18/2011	1:29:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	1:30:06 PM	Recipe started at 1:30 PM
1/18/2011	1:30:06 PM	Helium valve closed
1/18/2011	1:30:06 PM	H2 valve closed
1/18/2011	1:30:06 PM	BCl3 valve closed
1/18/2011	1:30:06 PM	PH3 valve closed
1/18/2011	1:30:06 PM	SiCl4 pre valve closed
1/18/2011	1:30:06 PM	SiCl4 post valve closed
1/18/2011	1:30:06 PM	Main Vac valve closed
1/18/2011	1:30:06 PM	Bubbler valve closed
1/18/2011	1:30:06 PM	Bypass valve opened
1/18/2011	1:30:06 PM	Helium MFC set to  0.000000
1/18/2011	1:30:06 PM	H2 MFC set to  0.000000
1/18/2011	1:30:06 PM	BCl3 MFC set to  0.000000
1/18/2011	1:30:06 PM	PHl3 MFC set to  0.000000
1/18/2011	1:30:06 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:30:06 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:30:06 PM	Tube furnace set to 0
1/18/2011	1:30:07 PM	Helium valve closed
1/18/2011	1:30:07 PM	H2 valve closed
1/18/2011	1:30:07 PM	BCl3 valve closed
1/18/2011	1:30:07 PM	PH3 valve closed
1/18/2011	1:30:07 PM	SiCl4 pre valve closed
1/18/2011	1:30:07 PM	SiCl4 post valve closed
1/18/2011	1:30:07 PM	Bubbler valve closed
1/18/2011	1:30:07 PM	Main Vac valve opened
1/18/2011	1:30:07 PM	Bypass valve opened
1/18/2011	1:30:07 PM	Helium MFC set to  0.000000
1/18/2011	1:30:07 PM	H2 MFC set to  0.000000
1/18/2011	1:30:07 PM	BCl3 MFC set to  0.000000
1/18/2011	1:30:07 PM	PHl3 MFC set to  0.000000
1/18/2011	1:30:07 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:30:07 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:30:07 PM	Tube furnace set to 0
1/18/2011	1:31:07 PM	H2 valve closed
1/18/2011	1:31:07 PM	BCl3 valve closed
1/18/2011	1:31:07 PM	PH3 valve closed
1/18/2011	1:31:07 PM	SiCl4 pre valve closed
1/18/2011	1:31:07 PM	SiCl4 post valve closed
1/18/2011	1:31:07 PM	Bubbler valve closed
1/18/2011	1:31:07 PM	Helium valve opened
1/18/2011	1:31:07 PM	Main Vac valve opened
1/18/2011	1:31:07 PM	Bypass valve opened
1/18/2011	1:31:07 PM	Helium MFC set to  100.000000
1/18/2011	1:31:07 PM	H2 MFC set to  0.000000
1/18/2011	1:31:07 PM	BCl3 MFC set to  0.000000
1/18/2011	1:31:07 PM	PHl3 MFC set to  0.000000
1/18/2011	1:31:07 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:31:07 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:31:07 PM	Tube furnace set to 0
1/18/2011	1:32:07 PM	Helium valve closed
1/18/2011	1:32:07 PM	H2 valve closed
1/18/2011	1:32:07 PM	BCl3 valve closed
1/18/2011	1:32:07 PM	PH3 valve closed
1/18/2011	1:32:07 PM	SiCl4 pre valve closed
1/18/2011	1:32:07 PM	SiCl4 post valve closed
1/18/2011	1:32:07 PM	Bubbler valve closed
1/18/2011	1:32:07 PM	Main Vac valve opened
1/18/2011	1:32:07 PM	Bypass valve opened
1/18/2011	1:32:07 PM	Helium MFC set to  0.000000
1/18/2011	1:32:07 PM	H2 MFC set to  0.000000
1/18/2011	1:32:07 PM	BCl3 MFC set to  0.000000
1/18/2011	1:32:07 PM	PHl3 MFC set to  0.000000
1/18/2011	1:32:07 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:32:07 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:32:07 PM	Tube furnace set to 0
1/18/2011	1:33:07 PM	H2 valve closed
1/18/2011	1:33:07 PM	BCl3 valve closed
1/18/2011	1:33:07 PM	PH3 valve closed
1/18/2011	1:33:07 PM	SiCl4 pre valve closed
1/18/2011	1:33:07 PM	SiCl4 post valve closed
1/18/2011	1:33:07 PM	Bubbler valve closed
1/18/2011	1:33:07 PM	Helium valve opened
1/18/2011	1:33:07 PM	Main Vac valve opened
1/18/2011	1:33:07 PM	Bypass valve opened
1/18/2011	1:33:07 PM	Helium MFC set to  100.000000
1/18/2011	1:33:07 PM	H2 MFC set to  0.000000
1/18/2011	1:33:07 PM	BCl3 MFC set to  0.000000
1/18/2011	1:33:07 PM	PHl3 MFC set to  0.000000
1/18/2011	1:33:07 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:33:07 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:33:08 PM	Tube furnace set to 0
1/18/2011	1:34:08 PM	Helium valve closed
1/18/2011	1:34:08 PM	H2 valve closed
1/18/2011	1:34:08 PM	BCl3 valve closed
1/18/2011	1:34:08 PM	PH3 valve closed
1/18/2011	1:34:08 PM	SiCl4 pre valve closed
1/18/2011	1:34:08 PM	SiCl4 post valve closed
1/18/2011	1:34:08 PM	Bubbler valve closed
1/18/2011	1:34:08 PM	Main Vac valve opened
1/18/2011	1:34:08 PM	Bypass valve opened
1/18/2011	1:34:08 PM	Helium MFC set to  0.000000
1/18/2011	1:34:08 PM	H2 MFC set to  0.000000
1/18/2011	1:34:08 PM	BCl3 MFC set to  0.000000
1/18/2011	1:34:08 PM	PHl3 MFC set to  0.000000
1/18/2011	1:34:08 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:34:08 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:34:08 PM	Tube furnace set to 0
1/18/2011	1:35:08 PM	H2 valve closed
1/18/2011	1:35:08 PM	BCl3 valve closed
1/18/2011	1:35:08 PM	PH3 valve closed
1/18/2011	1:35:08 PM	SiCl4 pre valve closed
1/18/2011	1:35:08 PM	SiCl4 post valve closed
1/18/2011	1:35:08 PM	Bubbler valve closed
1/18/2011	1:35:08 PM	Helium valve opened
1/18/2011	1:35:08 PM	Main Vac valve opened
1/18/2011	1:35:08 PM	Bypass valve opened
1/18/2011	1:35:08 PM	Helium MFC set to  100.000000
1/18/2011	1:35:08 PM	H2 MFC set to  0.000000
1/18/2011	1:35:08 PM	BCl3 MFC set to  0.000000
1/18/2011	1:35:08 PM	PHl3 MFC set to  0.000000
1/18/2011	1:35:08 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:35:08 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:35:08 PM	Tube furnace set to 0
1/18/2011	1:36:08 PM	Helium valve closed
1/18/2011	1:36:08 PM	H2 valve closed
1/18/2011	1:36:08 PM	BCl3 valve closed
1/18/2011	1:36:08 PM	PH3 valve closed
1/18/2011	1:36:08 PM	SiCl4 pre valve closed
1/18/2011	1:36:08 PM	SiCl4 post valve closed
1/18/2011	1:36:08 PM	Bubbler valve closed
1/18/2011	1:36:08 PM	Main Vac valve opened
1/18/2011	1:36:08 PM	Bypass valve opened
1/18/2011	1:36:08 PM	Helium MFC set to  0.000000
1/18/2011	1:36:08 PM	H2 MFC set to  0.000000
1/18/2011	1:36:08 PM	BCl3 MFC set to  0.000000
1/18/2011	1:36:08 PM	PHl3 MFC set to  0.000000
1/18/2011	1:36:08 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:36:08 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:36:08 PM	Tube furnace set to 0
1/18/2011	1:37:08 PM	H2 valve closed
1/18/2011	1:37:08 PM	BCl3 valve closed
1/18/2011	1:37:08 PM	PH3 valve closed
1/18/2011	1:37:08 PM	SiCl4 pre valve closed
1/18/2011	1:37:08 PM	SiCl4 post valve closed
1/18/2011	1:37:08 PM	Bubbler valve closed
1/18/2011	1:37:08 PM	Helium valve opened
1/18/2011	1:37:08 PM	Main Vac valve opened
1/18/2011	1:37:08 PM	Bypass valve opened
1/18/2011	1:37:08 PM	Helium MFC set to  100.000000
1/18/2011	1:37:08 PM	H2 MFC set to  0.000000
1/18/2011	1:37:08 PM	BCl3 MFC set to  0.000000
1/18/2011	1:37:08 PM	PHl3 MFC set to  0.000000
1/18/2011	1:37:08 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:37:08 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:37:08 PM	Tube furnace set to 0
1/18/2011	1:38:08 PM	Helium valve closed
1/18/2011	1:38:08 PM	H2 valve closed
1/18/2011	1:38:08 PM	BCl3 valve closed
1/18/2011	1:38:08 PM	PH3 valve closed
1/18/2011	1:38:08 PM	SiCl4 pre valve closed
1/18/2011	1:38:08 PM	SiCl4 post valve closed
1/18/2011	1:38:08 PM	Bubbler valve closed
1/18/2011	1:38:08 PM	Main Vac valve opened
1/18/2011	1:38:08 PM	Bypass valve opened
1/18/2011	1:38:08 PM	Helium MFC set to  0.000000
1/18/2011	1:38:08 PM	H2 MFC set to  0.000000
1/18/2011	1:38:08 PM	BCl3 MFC set to  0.000000
1/18/2011	1:38:08 PM	PHl3 MFC set to  0.000000
1/18/2011	1:38:08 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:38:08 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:38:09 PM	Tube furnace set to 0
1/18/2011	1:39:09 PM	H2 valve closed
1/18/2011	1:39:09 PM	BCl3 valve closed
1/18/2011	1:39:09 PM	PH3 valve closed
1/18/2011	1:39:09 PM	SiCl4 pre valve closed
1/18/2011	1:39:09 PM	SiCl4 post valve closed
1/18/2011	1:39:09 PM	Bubbler valve closed
1/18/2011	1:39:09 PM	Helium valve opened
1/18/2011	1:39:09 PM	Main Vac valve opened
1/18/2011	1:39:09 PM	Bypass valve opened
1/18/2011	1:39:09 PM	Helium MFC set to  100.000000
1/18/2011	1:39:09 PM	H2 MFC set to  0.000000
1/18/2011	1:39:09 PM	BCl3 MFC set to  0.000000
1/18/2011	1:39:09 PM	PHl3 MFC set to  0.000000
1/18/2011	1:39:09 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:39:09 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:39:09 PM	Tube furnace set to 0
1/18/2011	1:40:09 PM	Helium valve closed
1/18/2011	1:40:09 PM	H2 valve closed
1/18/2011	1:40:09 PM	BCl3 valve closed
1/18/2011	1:40:09 PM	PH3 valve closed
1/18/2011	1:40:09 PM	SiCl4 pre valve closed
1/18/2011	1:40:09 PM	SiCl4 post valve closed
1/18/2011	1:40:09 PM	Bubbler valve closed
1/18/2011	1:40:09 PM	Main Vac valve opened
1/18/2011	1:40:09 PM	Bypass valve opened
1/18/2011	1:40:09 PM	Helium MFC set to  0.000000
1/18/2011	1:40:09 PM	H2 MFC set to  0.000000
1/18/2011	1:40:09 PM	BCl3 MFC set to  0.000000
1/18/2011	1:40:09 PM	PHl3 MFC set to  0.000000
1/18/2011	1:40:09 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:40:09 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:40:09 PM	Tube furnace set to 0
1/18/2011	1:41:09 PM	H2 valve closed
1/18/2011	1:41:09 PM	BCl3 valve closed
1/18/2011	1:41:09 PM	PH3 valve closed
1/18/2011	1:41:09 PM	SiCl4 pre valve closed
1/18/2011	1:41:09 PM	SiCl4 post valve closed
1/18/2011	1:41:09 PM	Bubbler valve closed
1/18/2011	1:41:09 PM	Helium valve opened
1/18/2011	1:41:09 PM	Main Vac valve opened
1/18/2011	1:41:09 PM	Bypass valve opened
1/18/2011	1:41:09 PM	Helium MFC set to  100.000000
1/18/2011	1:41:09 PM	H2 MFC set to  0.000000
1/18/2011	1:41:09 PM	BCl3 MFC set to  0.000000
1/18/2011	1:41:09 PM	PHl3 MFC set to  0.000000
1/18/2011	1:41:09 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:41:09 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:41:09 PM	Tube furnace set to 0
1/18/2011	1:42:09 PM	Helium valve closed
1/18/2011	1:42:09 PM	H2 valve closed
1/18/2011	1:42:09 PM	BCl3 valve closed
1/18/2011	1:42:09 PM	PH3 valve closed
1/18/2011	1:42:09 PM	SiCl4 pre valve closed
1/18/2011	1:42:09 PM	SiCl4 post valve closed
1/18/2011	1:42:09 PM	Bubbler valve closed
1/18/2011	1:42:09 PM	Main Vac valve opened
1/18/2011	1:42:09 PM	Bypass valve opened
1/18/2011	1:42:09 PM	Helium MFC set to  0.000000
1/18/2011	1:42:09 PM	H2 MFC set to  0.000000
1/18/2011	1:42:09 PM	BCl3 MFC set to  0.000000
1/18/2011	1:42:09 PM	PHl3 MFC set to  0.000000
1/18/2011	1:42:09 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:42:09 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:42:09 PM	Tube furnace set to 0
1/18/2011	1:43:09 PM	H2 valve closed
1/18/2011	1:43:09 PM	BCl3 valve closed
1/18/2011	1:43:09 PM	PH3 valve closed
1/18/2011	1:43:09 PM	SiCl4 pre valve closed
1/18/2011	1:43:09 PM	SiCl4 post valve closed
1/18/2011	1:43:09 PM	Bubbler valve closed
1/18/2011	1:43:09 PM	Helium valve opened
1/18/2011	1:43:09 PM	Main Vac valve opened
1/18/2011	1:43:09 PM	Bypass valve opened
1/18/2011	1:43:09 PM	Helium MFC set to  100.000000
1/18/2011	1:43:09 PM	H2 MFC set to  0.000000
1/18/2011	1:43:09 PM	BCl3 MFC set to  0.000000
1/18/2011	1:43:09 PM	PHl3 MFC set to  0.000000
1/18/2011	1:43:09 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:43:09 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:43:10 PM	Tube furnace set to 0
1/18/2011	1:44:10 PM	Helium valve closed
1/18/2011	1:44:10 PM	H2 valve closed
1/18/2011	1:44:10 PM	BCl3 valve closed
1/18/2011	1:44:10 PM	PH3 valve closed
1/18/2011	1:44:10 PM	SiCl4 pre valve closed
1/18/2011	1:44:10 PM	SiCl4 post valve closed
1/18/2011	1:44:10 PM	Bubbler valve closed
1/18/2011	1:44:10 PM	Main Vac valve opened
1/18/2011	1:44:10 PM	Bypass valve opened
1/18/2011	1:44:10 PM	Helium MFC set to  0.000000
1/18/2011	1:44:10 PM	H2 MFC set to  0.000000
1/18/2011	1:44:10 PM	BCl3 MFC set to  0.000000
1/18/2011	1:44:10 PM	PHl3 MFC set to  0.000000
1/18/2011	1:44:10 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:44:10 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:44:10 PM	Tube furnace set to 0
1/18/2011	1:45:10 PM	H2 valve closed
1/18/2011	1:45:10 PM	BCl3 valve closed
1/18/2011	1:45:10 PM	PH3 valve closed
1/18/2011	1:45:10 PM	SiCl4 pre valve closed
1/18/2011	1:45:10 PM	SiCl4 post valve closed
1/18/2011	1:45:10 PM	Bubbler valve closed
1/18/2011	1:45:10 PM	Helium valve opened
1/18/2011	1:45:10 PM	Main Vac valve opened
1/18/2011	1:45:10 PM	Bypass valve opened
1/18/2011	1:45:10 PM	Helium MFC set to  100.000000
1/18/2011	1:45:10 PM	H2 MFC set to  0.000000
1/18/2011	1:45:10 PM	BCl3 MFC set to  0.000000
1/18/2011	1:45:10 PM	PHl3 MFC set to  0.000000
1/18/2011	1:45:10 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:45:10 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:45:10 PM	Tube furnace set to 0
1/18/2011	1:46:10 PM	Helium valve closed
1/18/2011	1:46:10 PM	H2 valve closed
1/18/2011	1:46:10 PM	BCl3 valve closed
1/18/2011	1:46:10 PM	PH3 valve closed
1/18/2011	1:46:10 PM	SiCl4 pre valve closed
1/18/2011	1:46:10 PM	SiCl4 post valve closed
1/18/2011	1:46:10 PM	Bubbler valve closed
1/18/2011	1:46:10 PM	Main Vac valve opened
1/18/2011	1:46:10 PM	Bypass valve opened
1/18/2011	1:46:10 PM	Helium MFC set to  0.000000
1/18/2011	1:46:10 PM	H2 MFC set to  0.000000
1/18/2011	1:46:10 PM	BCl3 MFC set to  0.000000
1/18/2011	1:46:10 PM	PHl3 MFC set to  0.000000
1/18/2011	1:46:10 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:46:10 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:46:10 PM	Tube furnace set to 0
1/18/2011	1:46:58 PM	Run aborted at 1:46 PM
1/18/2011	1:46:58 PM	Helium valve closed
1/18/2011	1:46:58 PM	H2 valve closed
1/18/2011	1:46:58 PM	BCl3 valve closed
1/18/2011	1:46:58 PM	PH3 valve closed
1/18/2011	1:46:58 PM	SiCl4 pre valve closed
1/18/2011	1:46:58 PM	SiCl4 post valve closed
1/18/2011	1:46:58 PM	Bypass valve closed
1/18/2011	1:46:58 PM	Main Vac valve closed
1/18/2011	1:46:58 PM	Bubbler valve closed
1/18/2011	1:46:58 PM	Helium MFC set to  0.000000
1/18/2011	1:46:58 PM	H2 MFC set to  0.000000
1/18/2011	1:46:58 PM	BCl3 MFC set to  0.000000
1/18/2011	1:46:58 PM	PHl3 MFC set to  0.000000
1/18/2011	1:46:58 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:46:58 PM	Tube furnace set to 0
1/18/2011	1:46:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	1:47:16 PM	Helium MFC set to  100.000000
1/18/2011	1:47:18 PM	Helium valve opened
1/18/2011	1:47:50 PM	Helium valve closed
1/18/2011	1:47:52 PM	Bypass valve opened
1/18/2011	1:47:59 PM	Main Vac valve opened
1/18/2011	1:48:58 PM	Helium valve opened
1/18/2011	1:49:18 PM	Helium valve closed
1/18/2011	1:50:15 PM	Recipe started at 1:50 PM
1/18/2011	1:50:15 PM	Helium valve closed
1/18/2011	1:50:15 PM	BCl3 valve closed
1/18/2011	1:50:15 PM	PH3 valve closed
1/18/2011	1:50:15 PM	SiCl4 pre valve closed
1/18/2011	1:50:15 PM	SiCl4 post valve closed
1/18/2011	1:50:15 PM	Main Vac valve closed
1/18/2011	1:50:15 PM	Bypass valve closed
1/18/2011	1:50:15 PM	Bubbler valve closed
1/18/2011	1:50:15 PM	H2 valve opened
1/18/2011	1:50:15 PM	Helium MFC set to  0.000000
1/18/2011	1:50:15 PM	H2 MFC set to  500.000000
1/18/2011	1:50:15 PM	BCl3 MFC set to  0.000000
1/18/2011	1:50:15 PM	PHl3 MFC set to  0.000000
1/18/2011	1:50:15 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:50:15 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:50:15 PM	Tube furnace set to 0
1/18/2011	1:51:36 PM	Helium valve closed
1/18/2011	1:51:36 PM	BCl3 valve closed
1/18/2011	1:51:36 PM	PH3 valve closed
1/18/2011	1:51:36 PM	SiCl4 pre valve closed
1/18/2011	1:51:36 PM	SiCl4 post valve closed
1/18/2011	1:51:36 PM	Main Vac valve closed
1/18/2011	1:51:36 PM	Bypass valve closed
1/18/2011	1:51:36 PM	H2 valve opened
1/18/2011	1:51:36 PM	Bubbler valve opened
1/18/2011	1:51:36 PM	Helium MFC set to  0.000000
1/18/2011	1:51:36 PM	H2 MFC set to  500.000000
1/18/2011	1:51:36 PM	BCl3 MFC set to  0.000000
1/18/2011	1:51:36 PM	PHl3 MFC set to  0.000000
1/18/2011	1:51:36 PM	SiCl4 MFC set to  0.000000
1/18/2011	1:51:36 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	1:51:36 PM	Tube furnace set to 1000
1/18/2011	2:11:36 PM	Helium valve closed
1/18/2011	2:11:36 PM	PH3 valve closed
1/18/2011	2:11:36 PM	Main Vac valve closed
1/18/2011	2:11:36 PM	Bypass valve closed
1/18/2011	2:11:36 PM	H2 valve opened
1/18/2011	2:11:36 PM	BCl3 valve opened
1/18/2011	2:11:36 PM	SiCl4 pre valve opened
1/18/2011	2:11:36 PM	SiCl4 post valve opened
1/18/2011	2:11:36 PM	Bubbler valve opened
1/18/2011	2:11:36 PM	Helium MFC set to  0.000000
1/18/2011	2:11:36 PM	H2 MFC set to  500.000000
1/18/2011	2:11:36 PM	BCl3 MFC set to  2.000000
1/18/2011	2:11:36 PM	PHl3 MFC set to  0.000000
1/18/2011	2:11:36 PM	SiCl4 MFC set to  50.000000
1/18/2011	2:11:36 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	2:11:37 PM	Tube furnace set to 1000
1/18/2011	2:31:37 PM	H2 valve closed
1/18/2011	2:31:37 PM	BCl3 valve closed
1/18/2011	2:31:37 PM	PH3 valve closed
1/18/2011	2:31:37 PM	SiCl4 pre valve closed
1/18/2011	2:31:37 PM	SiCl4 post valve closed
1/18/2011	2:31:37 PM	Main Vac valve closed
1/18/2011	2:31:37 PM	Bypass valve closed
1/18/2011	2:31:37 PM	Helium valve opened
1/18/2011	2:31:37 PM	Bubbler valve opened
1/18/2011	2:31:37 PM	Helium MFC set to  500.000000
1/18/2011	2:31:37 PM	H2 MFC set to  0.000000
1/18/2011	2:31:37 PM	BCl3 MFC set to  0.000000
1/18/2011	2:31:37 PM	PHl3 MFC set to  0.000000
1/18/2011	2:31:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	2:31:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	2:31:37 PM	Tube furnace set to 950
1/18/2011	2:36:37 PM	H2 valve closed
1/18/2011	2:36:37 PM	BCl3 valve closed
1/18/2011	2:36:37 PM	PH3 valve closed
1/18/2011	2:36:37 PM	SiCl4 pre valve closed
1/18/2011	2:36:37 PM	SiCl4 post valve closed
1/18/2011	2:36:37 PM	Main Vac valve closed
1/18/2011	2:36:37 PM	Bypass valve closed
1/18/2011	2:36:37 PM	Helium valve opened
1/18/2011	2:36:37 PM	Bubbler valve opened
1/18/2011	2:36:37 PM	Helium MFC set to  500.000000
1/18/2011	2:36:37 PM	H2 MFC set to  0.000000
1/18/2011	2:36:37 PM	BCl3 MFC set to  0.000000
1/18/2011	2:36:37 PM	PHl3 MFC set to  0.000000
1/18/2011	2:36:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	2:36:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	2:36:37 PM	Tube furnace set to 900
1/18/2011	2:41:37 PM	H2 valve closed
1/18/2011	2:41:37 PM	BCl3 valve closed
1/18/2011	2:41:37 PM	PH3 valve closed
1/18/2011	2:41:37 PM	SiCl4 pre valve closed
1/18/2011	2:41:37 PM	SiCl4 post valve closed
1/18/2011	2:41:37 PM	Main Vac valve closed
1/18/2011	2:41:37 PM	Bypass valve closed
1/18/2011	2:41:37 PM	Helium valve opened
1/18/2011	2:41:37 PM	Bubbler valve opened
1/18/2011	2:41:37 PM	Helium MFC set to  500.000000
1/18/2011	2:41:37 PM	H2 MFC set to  0.000000
1/18/2011	2:41:37 PM	BCl3 MFC set to  0.000000
1/18/2011	2:41:37 PM	PHl3 MFC set to  0.000000
1/18/2011	2:41:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	2:41:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	2:41:37 PM	Tube furnace set to 850
1/18/2011	2:46:37 PM	H2 valve closed
1/18/2011	2:46:37 PM	BCl3 valve closed
1/18/2011	2:46:37 PM	PH3 valve closed
1/18/2011	2:46:37 PM	SiCl4 pre valve closed
1/18/2011	2:46:37 PM	SiCl4 post valve closed
1/18/2011	2:46:37 PM	Main Vac valve closed
1/18/2011	2:46:37 PM	Bypass valve closed
1/18/2011	2:46:37 PM	Helium valve opened
1/18/2011	2:46:37 PM	Bubbler valve opened
1/18/2011	2:46:37 PM	Helium MFC set to  500.000000
1/18/2011	2:46:37 PM	H2 MFC set to  0.000000
1/18/2011	2:46:37 PM	BCl3 MFC set to  0.000000
1/18/2011	2:46:37 PM	PHl3 MFC set to  0.000000
1/18/2011	2:46:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	2:46:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	2:46:37 PM	Tube furnace set to 800
1/18/2011	2:51:37 PM	H2 valve closed
1/18/2011	2:51:37 PM	BCl3 valve closed
1/18/2011	2:51:37 PM	PH3 valve closed
1/18/2011	2:51:37 PM	SiCl4 pre valve closed
1/18/2011	2:51:37 PM	SiCl4 post valve closed
1/18/2011	2:51:37 PM	Main Vac valve closed
1/18/2011	2:51:37 PM	Bypass valve closed
1/18/2011	2:51:37 PM	Helium valve opened
1/18/2011	2:51:37 PM	Bubbler valve opened
1/18/2011	2:51:37 PM	Helium MFC set to  500.000000
1/18/2011	2:51:37 PM	H2 MFC set to  0.000000
1/18/2011	2:51:37 PM	BCl3 MFC set to  0.000000
1/18/2011	2:51:37 PM	PHl3 MFC set to  0.000000
1/18/2011	2:51:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	2:51:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	2:51:37 PM	Tube furnace set to 750
1/18/2011	2:56:38 PM	H2 valve closed
1/18/2011	2:56:38 PM	BCl3 valve closed
1/18/2011	2:56:38 PM	PH3 valve closed
1/18/2011	2:56:38 PM	SiCl4 pre valve closed
1/18/2011	2:56:38 PM	SiCl4 post valve closed
1/18/2011	2:56:38 PM	Main Vac valve closed
1/18/2011	2:56:38 PM	Bypass valve closed
1/18/2011	2:56:38 PM	Helium valve opened
1/18/2011	2:56:38 PM	Bubbler valve opened
1/18/2011	2:56:38 PM	Helium MFC set to  500.000000
1/18/2011	2:56:38 PM	H2 MFC set to  0.000000
1/18/2011	2:56:38 PM	BCl3 MFC set to  0.000000
1/18/2011	2:56:38 PM	PHl3 MFC set to  0.000000
1/18/2011	2:56:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	2:56:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	2:56:38 PM	Tube furnace set to 700
1/18/2011	3:01:38 PM	H2 valve closed
1/18/2011	3:01:38 PM	BCl3 valve closed
1/18/2011	3:01:38 PM	PH3 valve closed
1/18/2011	3:01:38 PM	SiCl4 pre valve closed
1/18/2011	3:01:38 PM	SiCl4 post valve closed
1/18/2011	3:01:38 PM	Main Vac valve closed
1/18/2011	3:01:38 PM	Bypass valve closed
1/18/2011	3:01:38 PM	Helium valve opened
1/18/2011	3:01:38 PM	Bubbler valve opened
1/18/2011	3:01:38 PM	Helium MFC set to  500.000000
1/18/2011	3:01:38 PM	H2 MFC set to  0.000000
1/18/2011	3:01:38 PM	BCl3 MFC set to  0.000000
1/18/2011	3:01:38 PM	PHl3 MFC set to  0.000000
1/18/2011	3:01:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	3:01:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	3:01:38 PM	Tube furnace set to 0
1/18/2011	3:21:38 PM	Helium valve closed
1/18/2011	3:21:38 PM	H2 valve closed
1/18/2011	3:21:38 PM	BCl3 valve closed
1/18/2011	3:21:38 PM	PH3 valve closed
1/18/2011	3:21:38 PM	SiCl4 pre valve closed
1/18/2011	3:21:38 PM	SiCl4 post valve closed
1/18/2011	3:21:38 PM	Main Vac valve closed
1/18/2011	3:21:38 PM	Bypass valve closed
1/18/2011	3:21:38 PM	Bubbler valve closed
1/18/2011	3:21:38 PM	Helium MFC set to  0.000000
1/18/2011	3:21:38 PM	H2 MFC set to  0.000000
1/18/2011	3:21:38 PM	BCl3 MFC set to  0.000000
1/18/2011	3:21:38 PM	PHl3 MFC set to  0.000000
1/18/2011	3:21:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	3:21:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	3:21:38 PM	Tube furnace set to 0
1/18/2011	3:21:38 PM	Run finished at 3:21 PM
1/18/2011	4:02:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/18/2011	4:02:13 PM	Recipe started at 4:02 PM
1/18/2011	4:02:13 PM	H2 valve closed
1/18/2011	4:02:13 PM	BCl3 valve closed
1/18/2011	4:02:13 PM	PH3 valve closed
1/18/2011	4:02:13 PM	SiCl4 pre valve closed
1/18/2011	4:02:13 PM	SiCl4 post valve closed
1/18/2011	4:02:13 PM	Main Vac valve closed
1/18/2011	4:02:13 PM	Bypass valve closed
1/18/2011	4:02:13 PM	Bubbler valve closed
1/18/2011	4:02:13 PM	Helium valve opened
1/18/2011	4:02:13 PM	Helium MFC set to  500.000000
1/18/2011	4:02:13 PM	H2 MFC set to  0.000000
1/18/2011	4:02:13 PM	BCl3 MFC set to  0.000000
1/18/2011	4:02:13 PM	PHl3 MFC set to  0.000000
1/18/2011	4:02:13 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:02:13 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:02:13 PM	Tube furnace set to 0
1/18/2011	4:02:15 PM	Helium valve closed
1/18/2011	4:02:15 PM	H2 valve closed
1/18/2011	4:02:15 PM	BCl3 valve closed
1/18/2011	4:02:15 PM	PH3 valve closed
1/18/2011	4:02:15 PM	SiCl4 pre valve closed
1/18/2011	4:02:15 PM	SiCl4 post valve closed
1/18/2011	4:02:15 PM	Main Vac valve closed
1/18/2011	4:02:15 PM	Bypass valve closed
1/18/2011	4:02:15 PM	Bubbler valve closed
1/18/2011	4:02:15 PM	Helium MFC set to  0.000000
1/18/2011	4:02:15 PM	H2 MFC set to  0.000000
1/18/2011	4:02:15 PM	BCl3 MFC set to  0.000000
1/18/2011	4:02:15 PM	PHl3 MFC set to  0.000000
1/18/2011	4:02:15 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:02:15 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:02:15 PM	Tube furnace set to 0
1/18/2011	4:02:15 PM	Run finished at 4:02 PM
1/18/2011	4:02:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/18/2011	4:13:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	4:13:55 PM	Recipe started at 4:13 PM
1/18/2011	4:13:55 PM	Helium valve closed
1/18/2011	4:13:55 PM	H2 valve closed
1/18/2011	4:13:55 PM	BCl3 valve closed
1/18/2011	4:13:55 PM	PH3 valve closed
1/18/2011	4:13:55 PM	SiCl4 pre valve closed
1/18/2011	4:13:55 PM	SiCl4 post valve closed
1/18/2011	4:13:55 PM	Main Vac valve closed
1/18/2011	4:13:55 PM	Bubbler valve closed
1/18/2011	4:13:55 PM	Bypass valve opened
1/18/2011	4:13:55 PM	Helium MFC set to  0.000000
1/18/2011	4:13:55 PM	H2 MFC set to  0.000000
1/18/2011	4:13:55 PM	BCl3 MFC set to  0.000000
1/18/2011	4:13:55 PM	PHl3 MFC set to  0.000000
1/18/2011	4:13:55 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:13:55 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:13:55 PM	Tube furnace set to 0
1/18/2011	4:14:27 PM	Helium valve closed
1/18/2011	4:14:27 PM	H2 valve closed
1/18/2011	4:14:27 PM	BCl3 valve closed
1/18/2011	4:14:27 PM	PH3 valve closed
1/18/2011	4:14:27 PM	SiCl4 pre valve closed
1/18/2011	4:14:27 PM	SiCl4 post valve closed
1/18/2011	4:14:27 PM	Bubbler valve closed
1/18/2011	4:14:27 PM	Main Vac valve opened
1/18/2011	4:14:27 PM	Bypass valve opened
1/18/2011	4:14:27 PM	Helium MFC set to  0.000000
1/18/2011	4:14:27 PM	H2 MFC set to  0.000000
1/18/2011	4:14:27 PM	BCl3 MFC set to  0.000000
1/18/2011	4:14:27 PM	PHl3 MFC set to  0.000000
1/18/2011	4:14:27 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:14:27 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:14:28 PM	Tube furnace set to 0
1/18/2011	4:14:28 PM	Run finished at 4:14 PM
1/18/2011	4:14:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	4:16:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	4:16:36 PM	Recipe started at 4:16 PM
1/18/2011	4:16:36 PM	Helium valve closed
1/18/2011	4:16:36 PM	H2 valve closed
1/18/2011	4:16:36 PM	BCl3 valve closed
1/18/2011	4:16:37 PM	PH3 valve closed
1/18/2011	4:16:37 PM	SiCl4 pre valve closed
1/18/2011	4:16:37 PM	SiCl4 post valve closed
1/18/2011	4:16:37 PM	Main Vac valve closed
1/18/2011	4:16:37 PM	Bubbler valve closed
1/18/2011	4:16:37 PM	Bypass valve opened
1/18/2011	4:16:37 PM	Helium MFC set to  0.000000
1/18/2011	4:16:37 PM	H2 MFC set to  0.000000
1/18/2011	4:16:37 PM	BCl3 MFC set to  0.000000
1/18/2011	4:16:37 PM	PHl3 MFC set to  0.000000
1/18/2011	4:16:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:16:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:16:37 PM	Tube furnace set to 0
1/18/2011	4:16:37 PM	Helium valve closed
1/18/2011	4:16:37 PM	H2 valve closed
1/18/2011	4:16:37 PM	BCl3 valve closed
1/18/2011	4:16:37 PM	PH3 valve closed
1/18/2011	4:16:37 PM	SiCl4 pre valve closed
1/18/2011	4:16:37 PM	SiCl4 post valve closed
1/18/2011	4:16:37 PM	Bubbler valve closed
1/18/2011	4:16:37 PM	Main Vac valve opened
1/18/2011	4:16:37 PM	Bypass valve opened
1/18/2011	4:16:37 PM	Helium MFC set to  0.000000
1/18/2011	4:16:37 PM	H2 MFC set to  0.000000
1/18/2011	4:16:37 PM	BCl3 MFC set to  0.000000
1/18/2011	4:16:37 PM	PHl3 MFC set to  0.000000
1/18/2011	4:16:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:16:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:16:37 PM	Tube furnace set to 0
1/18/2011	4:17:37 PM	H2 valve closed
1/18/2011	4:17:37 PM	BCl3 valve closed
1/18/2011	4:17:37 PM	PH3 valve closed
1/18/2011	4:17:37 PM	SiCl4 pre valve closed
1/18/2011	4:17:37 PM	SiCl4 post valve closed
1/18/2011	4:17:37 PM	Bubbler valve closed
1/18/2011	4:17:37 PM	Helium valve opened
1/18/2011	4:17:37 PM	Main Vac valve opened
1/18/2011	4:17:37 PM	Bypass valve opened
1/18/2011	4:17:37 PM	Helium MFC set to  100.000000
1/18/2011	4:17:37 PM	H2 MFC set to  0.000000
1/18/2011	4:17:37 PM	BCl3 MFC set to  0.000000
1/18/2011	4:17:37 PM	PHl3 MFC set to  0.000000
1/18/2011	4:17:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:17:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:17:37 PM	Tube furnace set to 0
1/18/2011	4:18:37 PM	Helium valve closed
1/18/2011	4:18:37 PM	H2 valve closed
1/18/2011	4:18:37 PM	BCl3 valve closed
1/18/2011	4:18:37 PM	PH3 valve closed
1/18/2011	4:18:37 PM	SiCl4 pre valve closed
1/18/2011	4:18:37 PM	SiCl4 post valve closed
1/18/2011	4:18:37 PM	Bubbler valve closed
1/18/2011	4:18:37 PM	Main Vac valve opened
1/18/2011	4:18:37 PM	Bypass valve opened
1/18/2011	4:18:37 PM	Helium MFC set to  0.000000
1/18/2011	4:18:37 PM	H2 MFC set to  0.000000
1/18/2011	4:18:37 PM	BCl3 MFC set to  0.000000
1/18/2011	4:18:37 PM	PHl3 MFC set to  0.000000
1/18/2011	4:18:37 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:18:37 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:18:38 PM	Tube furnace set to 0
1/18/2011	4:19:38 PM	H2 valve closed
1/18/2011	4:19:38 PM	BCl3 valve closed
1/18/2011	4:19:38 PM	PH3 valve closed
1/18/2011	4:19:38 PM	SiCl4 pre valve closed
1/18/2011	4:19:38 PM	SiCl4 post valve closed
1/18/2011	4:19:38 PM	Bubbler valve closed
1/18/2011	4:19:38 PM	Helium valve opened
1/18/2011	4:19:38 PM	Main Vac valve opened
1/18/2011	4:19:38 PM	Bypass valve opened
1/18/2011	4:19:38 PM	Helium MFC set to  100.000000
1/18/2011	4:19:38 PM	H2 MFC set to  0.000000
1/18/2011	4:19:38 PM	BCl3 MFC set to  0.000000
1/18/2011	4:19:38 PM	PHl3 MFC set to  0.000000
1/18/2011	4:19:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:19:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:19:38 PM	Tube furnace set to 0
1/18/2011	4:20:38 PM	Helium valve closed
1/18/2011	4:20:38 PM	H2 valve closed
1/18/2011	4:20:38 PM	BCl3 valve closed
1/18/2011	4:20:38 PM	PH3 valve closed
1/18/2011	4:20:38 PM	SiCl4 pre valve closed
1/18/2011	4:20:38 PM	SiCl4 post valve closed
1/18/2011	4:20:38 PM	Bubbler valve closed
1/18/2011	4:20:38 PM	Main Vac valve opened
1/18/2011	4:20:38 PM	Bypass valve opened
1/18/2011	4:20:38 PM	Helium MFC set to  0.000000
1/18/2011	4:20:38 PM	H2 MFC set to  0.000000
1/18/2011	4:20:38 PM	BCl3 MFC set to  0.000000
1/18/2011	4:20:38 PM	PHl3 MFC set to  0.000000
1/18/2011	4:20:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:20:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:20:38 PM	Tube furnace set to 0
1/18/2011	4:21:38 PM	H2 valve closed
1/18/2011	4:21:38 PM	BCl3 valve closed
1/18/2011	4:21:38 PM	PH3 valve closed
1/18/2011	4:21:38 PM	SiCl4 pre valve closed
1/18/2011	4:21:38 PM	SiCl4 post valve closed
1/18/2011	4:21:38 PM	Bubbler valve closed
1/18/2011	4:21:38 PM	Helium valve opened
1/18/2011	4:21:38 PM	Main Vac valve opened
1/18/2011	4:21:38 PM	Bypass valve opened
1/18/2011	4:21:38 PM	Helium MFC set to  100.000000
1/18/2011	4:21:38 PM	H2 MFC set to  0.000000
1/18/2011	4:21:38 PM	BCl3 MFC set to  0.000000
1/18/2011	4:21:38 PM	PHl3 MFC set to  0.000000
1/18/2011	4:21:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:21:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:21:38 PM	Tube furnace set to 0
1/18/2011	4:22:38 PM	Helium valve closed
1/18/2011	4:22:38 PM	H2 valve closed
1/18/2011	4:22:38 PM	BCl3 valve closed
1/18/2011	4:22:38 PM	PH3 valve closed
1/18/2011	4:22:38 PM	SiCl4 pre valve closed
1/18/2011	4:22:38 PM	SiCl4 post valve closed
1/18/2011	4:22:38 PM	Bubbler valve closed
1/18/2011	4:22:38 PM	Main Vac valve opened
1/18/2011	4:22:38 PM	Bypass valve opened
1/18/2011	4:22:38 PM	Helium MFC set to  0.000000
1/18/2011	4:22:38 PM	H2 MFC set to  0.000000
1/18/2011	4:22:38 PM	BCl3 MFC set to  0.000000
1/18/2011	4:22:38 PM	PHl3 MFC set to  0.000000
1/18/2011	4:22:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:22:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:22:38 PM	Tube furnace set to 0
1/18/2011	4:23:38 PM	H2 valve closed
1/18/2011	4:23:38 PM	BCl3 valve closed
1/18/2011	4:23:38 PM	PH3 valve closed
1/18/2011	4:23:38 PM	SiCl4 pre valve closed
1/18/2011	4:23:38 PM	SiCl4 post valve closed
1/18/2011	4:23:38 PM	Bubbler valve closed
1/18/2011	4:23:38 PM	Helium valve opened
1/18/2011	4:23:38 PM	Main Vac valve opened
1/18/2011	4:23:38 PM	Bypass valve opened
1/18/2011	4:23:38 PM	Helium MFC set to  100.000000
1/18/2011	4:23:38 PM	H2 MFC set to  0.000000
1/18/2011	4:23:38 PM	BCl3 MFC set to  0.000000
1/18/2011	4:23:38 PM	PHl3 MFC set to  0.000000
1/18/2011	4:23:38 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:23:38 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:23:39 PM	Tube furnace set to 0
1/18/2011	4:24:39 PM	Helium valve closed
1/18/2011	4:24:39 PM	H2 valve closed
1/18/2011	4:24:39 PM	BCl3 valve closed
1/18/2011	4:24:39 PM	PH3 valve closed
1/18/2011	4:24:39 PM	SiCl4 pre valve closed
1/18/2011	4:24:39 PM	SiCl4 post valve closed
1/18/2011	4:24:39 PM	Bubbler valve closed
1/18/2011	4:24:39 PM	Main Vac valve opened
1/18/2011	4:24:39 PM	Bypass valve opened
1/18/2011	4:24:39 PM	Helium MFC set to  0.000000
1/18/2011	4:24:39 PM	H2 MFC set to  0.000000
1/18/2011	4:24:39 PM	BCl3 MFC set to  0.000000
1/18/2011	4:24:39 PM	PHl3 MFC set to  0.000000
1/18/2011	4:24:39 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:24:39 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:24:39 PM	Tube furnace set to 0
1/18/2011	4:25:39 PM	H2 valve closed
1/18/2011	4:25:39 PM	BCl3 valve closed
1/18/2011	4:25:39 PM	PH3 valve closed
1/18/2011	4:25:39 PM	SiCl4 pre valve closed
1/18/2011	4:25:39 PM	SiCl4 post valve closed
1/18/2011	4:25:39 PM	Bubbler valve closed
1/18/2011	4:25:39 PM	Helium valve opened
1/18/2011	4:25:39 PM	Main Vac valve opened
1/18/2011	4:25:39 PM	Bypass valve opened
1/18/2011	4:25:39 PM	Helium MFC set to  100.000000
1/18/2011	4:25:39 PM	H2 MFC set to  0.000000
1/18/2011	4:25:39 PM	BCl3 MFC set to  0.000000
1/18/2011	4:25:39 PM	PHl3 MFC set to  0.000000
1/18/2011	4:25:39 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:25:39 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:25:39 PM	Tube furnace set to 0
1/18/2011	4:26:39 PM	Helium valve closed
1/18/2011	4:26:39 PM	H2 valve closed
1/18/2011	4:26:39 PM	BCl3 valve closed
1/18/2011	4:26:39 PM	PH3 valve closed
1/18/2011	4:26:39 PM	SiCl4 pre valve closed
1/18/2011	4:26:39 PM	SiCl4 post valve closed
1/18/2011	4:26:39 PM	Bubbler valve closed
1/18/2011	4:26:39 PM	Main Vac valve opened
1/18/2011	4:26:39 PM	Bypass valve opened
1/18/2011	4:26:39 PM	Helium MFC set to  0.000000
1/18/2011	4:26:39 PM	H2 MFC set to  0.000000
1/18/2011	4:26:39 PM	BCl3 MFC set to  0.000000
1/18/2011	4:26:39 PM	PHl3 MFC set to  0.000000
1/18/2011	4:26:39 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:26:39 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:26:39 PM	Tube furnace set to 0
1/18/2011	4:27:39 PM	H2 valve closed
1/18/2011	4:27:39 PM	BCl3 valve closed
1/18/2011	4:27:39 PM	PH3 valve closed
1/18/2011	4:27:39 PM	SiCl4 pre valve closed
1/18/2011	4:27:39 PM	SiCl4 post valve closed
1/18/2011	4:27:39 PM	Bubbler valve closed
1/18/2011	4:27:39 PM	Helium valve opened
1/18/2011	4:27:39 PM	Main Vac valve opened
1/18/2011	4:27:39 PM	Bypass valve opened
1/18/2011	4:27:39 PM	Helium MFC set to  100.000000
1/18/2011	4:27:39 PM	H2 MFC set to  0.000000
1/18/2011	4:27:39 PM	BCl3 MFC set to  0.000000
1/18/2011	4:27:39 PM	PHl3 MFC set to  0.000000
1/18/2011	4:27:39 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:27:39 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:27:39 PM	Tube furnace set to 0
1/18/2011	4:28:39 PM	Helium valve closed
1/18/2011	4:28:39 PM	H2 valve closed
1/18/2011	4:28:39 PM	BCl3 valve closed
1/18/2011	4:28:39 PM	PH3 valve closed
1/18/2011	4:28:39 PM	SiCl4 pre valve closed
1/18/2011	4:28:39 PM	SiCl4 post valve closed
1/18/2011	4:28:39 PM	Bubbler valve closed
1/18/2011	4:28:39 PM	Main Vac valve opened
1/18/2011	4:28:39 PM	Bypass valve opened
1/18/2011	4:28:39 PM	Helium MFC set to  0.000000
1/18/2011	4:28:39 PM	H2 MFC set to  0.000000
1/18/2011	4:28:39 PM	BCl3 MFC set to  0.000000
1/18/2011	4:28:39 PM	PHl3 MFC set to  0.000000
1/18/2011	4:28:39 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:28:39 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:28:40 PM	Tube furnace set to 0
1/18/2011	4:29:40 PM	H2 valve closed
1/18/2011	4:29:40 PM	BCl3 valve closed
1/18/2011	4:29:40 PM	PH3 valve closed
1/18/2011	4:29:40 PM	SiCl4 pre valve closed
1/18/2011	4:29:40 PM	SiCl4 post valve closed
1/18/2011	4:29:40 PM	Bubbler valve closed
1/18/2011	4:29:40 PM	Helium valve opened
1/18/2011	4:29:40 PM	Main Vac valve opened
1/18/2011	4:29:40 PM	Bypass valve opened
1/18/2011	4:29:40 PM	Helium MFC set to  100.000000
1/18/2011	4:29:40 PM	H2 MFC set to  0.000000
1/18/2011	4:29:40 PM	BCl3 MFC set to  0.000000
1/18/2011	4:29:40 PM	PHl3 MFC set to  0.000000
1/18/2011	4:29:40 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:29:40 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:29:40 PM	Tube furnace set to 0
1/18/2011	4:30:40 PM	Helium valve closed
1/18/2011	4:30:40 PM	H2 valve closed
1/18/2011	4:30:40 PM	BCl3 valve closed
1/18/2011	4:30:40 PM	PH3 valve closed
1/18/2011	4:30:40 PM	SiCl4 pre valve closed
1/18/2011	4:30:40 PM	SiCl4 post valve closed
1/18/2011	4:30:40 PM	Bubbler valve closed
1/18/2011	4:30:40 PM	Main Vac valve opened
1/18/2011	4:30:40 PM	Bypass valve opened
1/18/2011	4:30:40 PM	Helium MFC set to  0.000000
1/18/2011	4:30:40 PM	H2 MFC set to  0.000000
1/18/2011	4:30:40 PM	BCl3 MFC set to  0.000000
1/18/2011	4:30:40 PM	PHl3 MFC set to  0.000000
1/18/2011	4:30:40 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:30:40 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:30:40 PM	Tube furnace set to 0
1/18/2011	4:31:40 PM	H2 valve closed
1/18/2011	4:31:40 PM	BCl3 valve closed
1/18/2011	4:31:40 PM	PH3 valve closed
1/18/2011	4:31:40 PM	SiCl4 pre valve closed
1/18/2011	4:31:40 PM	SiCl4 post valve closed
1/18/2011	4:31:40 PM	Bubbler valve closed
1/18/2011	4:31:40 PM	Helium valve opened
1/18/2011	4:31:40 PM	Main Vac valve opened
1/18/2011	4:31:40 PM	Bypass valve opened
1/18/2011	4:31:40 PM	Helium MFC set to  100.000000
1/18/2011	4:31:40 PM	H2 MFC set to  0.000000
1/18/2011	4:31:40 PM	BCl3 MFC set to  0.000000
1/18/2011	4:31:40 PM	PHl3 MFC set to  0.000000
1/18/2011	4:31:40 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:31:40 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:31:40 PM	Tube furnace set to 0
1/18/2011	4:32:39 PM	Helium valve closed
1/18/2011	4:32:39 PM	H2 valve closed
1/18/2011	4:32:39 PM	BCl3 valve closed
1/18/2011	4:32:39 PM	PH3 valve closed
1/18/2011	4:32:39 PM	SiCl4 pre valve closed
1/18/2011	4:32:39 PM	SiCl4 post valve closed
1/18/2011	4:32:39 PM	Bubbler valve closed
1/18/2011	4:32:39 PM	Main Vac valve opened
1/18/2011	4:32:39 PM	Bypass valve opened
1/18/2011	4:32:39 PM	Helium MFC set to  0.000000
1/18/2011	4:32:39 PM	H2 MFC set to  0.000000
1/18/2011	4:32:39 PM	BCl3 MFC set to  0.000000
1/18/2011	4:32:39 PM	PHl3 MFC set to  0.000000
1/18/2011	4:32:39 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:32:39 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:32:39 PM	Tube furnace set to 0
1/18/2011	4:33:34 PM	Run aborted at 4:33 PM
1/18/2011	4:33:34 PM	Helium valve closed
1/18/2011	4:33:34 PM	H2 valve closed
1/18/2011	4:33:34 PM	BCl3 valve closed
1/18/2011	4:33:34 PM	PH3 valve closed
1/18/2011	4:33:34 PM	SiCl4 pre valve closed
1/18/2011	4:33:34 PM	SiCl4 post valve closed
1/18/2011	4:33:34 PM	Bypass valve closed
1/18/2011	4:33:34 PM	Main Vac valve closed
1/18/2011	4:33:34 PM	Bubbler valve closed
1/18/2011	4:33:34 PM	Helium MFC set to  0.000000
1/18/2011	4:33:34 PM	H2 MFC set to  0.000000
1/18/2011	4:33:34 PM	BCl3 MFC set to  0.000000
1/18/2011	4:33:34 PM	PHl3 MFC set to  0.000000
1/18/2011	4:33:34 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:33:34 PM	Tube furnace set to 0
1/18/2011	4:33:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	4:33:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	4:33:56 PM	Recipe started at 4:33 PM
1/18/2011	4:33:56 PM	Helium valve closed
1/18/2011	4:33:56 PM	H2 valve closed
1/18/2011	4:33:56 PM	BCl3 valve closed
1/18/2011	4:33:56 PM	PH3 valve closed
1/18/2011	4:33:56 PM	SiCl4 pre valve closed
1/18/2011	4:33:56 PM	SiCl4 post valve closed
1/18/2011	4:33:56 PM	Main Vac valve closed
1/18/2011	4:33:56 PM	Bubbler valve closed
1/18/2011	4:33:56 PM	Bypass valve opened
1/18/2011	4:33:56 PM	Helium MFC set to  0.000000
1/18/2011	4:33:56 PM	H2 MFC set to  0.000000
1/18/2011	4:33:56 PM	BCl3 MFC set to  0.000000
1/18/2011	4:33:56 PM	PHl3 MFC set to  0.000000
1/18/2011	4:33:56 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:33:56 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:33:56 PM	Tube furnace set to 0
1/18/2011	4:33:56 PM	Helium valve closed
1/18/2011	4:33:56 PM	H2 valve closed
1/18/2011	4:33:56 PM	BCl3 valve closed
1/18/2011	4:33:56 PM	PH3 valve closed
1/18/2011	4:33:56 PM	SiCl4 pre valve closed
1/18/2011	4:33:56 PM	SiCl4 post valve closed
1/18/2011	4:33:56 PM	Bubbler valve closed
1/18/2011	4:33:56 PM	Main Vac valve opened
1/18/2011	4:33:56 PM	Bypass valve opened
1/18/2011	4:33:56 PM	Helium MFC set to  0.000000
1/18/2011	4:33:56 PM	H2 MFC set to  0.000000
1/18/2011	4:33:56 PM	BCl3 MFC set to  0.000000
1/18/2011	4:33:56 PM	PHl3 MFC set to  0.000000
1/18/2011	4:33:56 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:33:56 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:33:56 PM	Tube furnace set to 0
1/18/2011	4:33:59 PM	Run aborted at 4:33 PM
1/18/2011	4:33:59 PM	Helium valve closed
1/18/2011	4:33:59 PM	H2 valve closed
1/18/2011	4:33:59 PM	BCl3 valve closed
1/18/2011	4:33:59 PM	PH3 valve closed
1/18/2011	4:33:59 PM	SiCl4 pre valve closed
1/18/2011	4:33:59 PM	SiCl4 post valve closed
1/18/2011	4:33:59 PM	Bypass valve closed
1/18/2011	4:33:59 PM	Main Vac valve closed
1/18/2011	4:33:59 PM	Bubbler valve closed
1/18/2011	4:33:59 PM	Helium MFC set to  0.000000
1/18/2011	4:33:59 PM	H2 MFC set to  0.000000
1/18/2011	4:33:59 PM	BCl3 MFC set to  0.000000
1/18/2011	4:33:59 PM	PHl3 MFC set to  0.000000
1/18/2011	4:33:59 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:33:59 PM	Tube furnace set to 0
1/18/2011	4:33:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	4:34:07 PM	Bypass valve opened
1/18/2011	4:34:08 PM	Main Vac valve opened
1/18/2011	4:34:24 PM	SiCl4 post valve opened
1/18/2011	4:34:24 PM	SiCl4 post valve closed
1/18/2011	4:34:25 PM	SiCl4 post valve opened
1/18/2011	4:34:26 PM	SiCl4 post valve closed
1/18/2011	4:34:27 PM	SiCl4 post valve opened
1/18/2011	4:34:28 PM	SiCl4 post valve closed
1/18/2011	4:34:30 PM	SiCl4 post valve opened
1/18/2011	4:34:38 PM	SiCl4 post valve closed
1/18/2011	4:34:39 PM	SiCl4 post valve opened
1/18/2011	4:34:40 PM	SiCl4 post valve closed
1/18/2011	4:34:40 PM	SiCl4 post valve opened
1/18/2011	4:34:42 PM	SiCl4 post valve closed
1/18/2011	4:34:43 PM	SiCl4 post valve opened
1/18/2011	4:34:45 PM	SiCl4 post valve closed
1/18/2011	4:34:46 PM	SiCl4 post valve opened
1/18/2011	4:34:48 PM	SiCl4 post valve closed
1/18/2011	4:34:48 PM	SiCl4 post valve opened
1/18/2011	4:34:49 PM	SiCl4 post valve closed
1/18/2011	4:34:51 PM	SiCl4 post valve opened
1/18/2011	4:34:52 PM	SiCl4 post valve closed
1/18/2011	4:34:53 PM	SiCl4 post valve opened
1/18/2011	4:34:53 PM	SiCl4 post valve closed
1/18/2011	4:35:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	4:35:22 PM	Recipe started at 4:35 PM
1/18/2011	4:35:22 PM	Helium valve closed
1/18/2011	4:35:22 PM	H2 valve closed
1/18/2011	4:35:22 PM	BCl3 valve closed
1/18/2011	4:35:22 PM	PH3 valve closed
1/18/2011	4:35:22 PM	SiCl4 pre valve closed
1/18/2011	4:35:22 PM	SiCl4 post valve closed
1/18/2011	4:35:22 PM	Main Vac valve closed
1/18/2011	4:35:22 PM	Bubbler valve closed
1/18/2011	4:35:22 PM	Bypass valve opened
1/18/2011	4:35:22 PM	Helium MFC set to  0.000000
1/18/2011	4:35:22 PM	H2 MFC set to  0.000000
1/18/2011	4:35:22 PM	BCl3 MFC set to  0.000000
1/18/2011	4:35:22 PM	PHl3 MFC set to  0.000000
1/18/2011	4:35:22 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:35:22 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:35:22 PM	Tube furnace set to 0
1/18/2011	4:35:23 PM	Helium valve closed
1/18/2011	4:35:23 PM	H2 valve closed
1/18/2011	4:35:23 PM	BCl3 valve closed
1/18/2011	4:35:23 PM	PH3 valve closed
1/18/2011	4:35:23 PM	SiCl4 pre valve closed
1/18/2011	4:35:23 PM	SiCl4 post valve closed
1/18/2011	4:35:23 PM	Bubbler valve closed
1/18/2011	4:35:23 PM	Main Vac valve opened
1/18/2011	4:35:23 PM	Bypass valve opened
1/18/2011	4:35:23 PM	Helium MFC set to  0.000000
1/18/2011	4:35:23 PM	H2 MFC set to  0.000000
1/18/2011	4:35:23 PM	BCl3 MFC set to  0.000000
1/18/2011	4:35:23 PM	PHl3 MFC set to  0.000000
1/18/2011	4:35:23 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:35:23 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:35:23 PM	Tube furnace set to 0
1/18/2011	4:36:23 PM	H2 valve closed
1/18/2011	4:36:23 PM	BCl3 valve closed
1/18/2011	4:36:23 PM	PH3 valve closed
1/18/2011	4:36:23 PM	SiCl4 pre valve closed
1/18/2011	4:36:23 PM	SiCl4 post valve closed
1/18/2011	4:36:23 PM	Bubbler valve closed
1/18/2011	4:36:23 PM	Helium valve opened
1/18/2011	4:36:23 PM	Main Vac valve opened
1/18/2011	4:36:23 PM	Bypass valve opened
1/18/2011	4:36:23 PM	Helium MFC set to  100.000000
1/18/2011	4:36:23 PM	H2 MFC set to  0.000000
1/18/2011	4:36:23 PM	BCl3 MFC set to  0.000000
1/18/2011	4:36:23 PM	PHl3 MFC set to  0.000000
1/18/2011	4:36:23 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:36:23 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:36:23 PM	Tube furnace set to 0
1/18/2011	4:37:23 PM	Helium valve closed
1/18/2011	4:37:23 PM	H2 valve closed
1/18/2011	4:37:23 PM	BCl3 valve closed
1/18/2011	4:37:23 PM	PH3 valve closed
1/18/2011	4:37:23 PM	SiCl4 pre valve closed
1/18/2011	4:37:23 PM	SiCl4 post valve closed
1/18/2011	4:37:23 PM	Bubbler valve closed
1/18/2011	4:37:23 PM	Main Vac valve opened
1/18/2011	4:37:23 PM	Bypass valve opened
1/18/2011	4:37:23 PM	Helium MFC set to  0.000000
1/18/2011	4:37:23 PM	H2 MFC set to  0.000000
1/18/2011	4:37:23 PM	BCl3 MFC set to  0.000000
1/18/2011	4:37:23 PM	PHl3 MFC set to  0.000000
1/18/2011	4:37:23 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:37:23 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:37:23 PM	Tube furnace set to 0
1/18/2011	4:38:23 PM	H2 valve closed
1/18/2011	4:38:23 PM	BCl3 valve closed
1/18/2011	4:38:23 PM	PH3 valve closed
1/18/2011	4:38:23 PM	SiCl4 pre valve closed
1/18/2011	4:38:23 PM	SiCl4 post valve closed
1/18/2011	4:38:23 PM	Bubbler valve closed
1/18/2011	4:38:23 PM	Helium valve opened
1/18/2011	4:38:23 PM	Main Vac valve opened
1/18/2011	4:38:23 PM	Bypass valve opened
1/18/2011	4:38:23 PM	Helium MFC set to  100.000000
1/18/2011	4:38:23 PM	H2 MFC set to  0.000000
1/18/2011	4:38:23 PM	BCl3 MFC set to  0.000000
1/18/2011	4:38:23 PM	PHl3 MFC set to  0.000000
1/18/2011	4:38:23 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:38:23 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:38:23 PM	Tube furnace set to 0
1/18/2011	4:39:23 PM	Helium valve closed
1/18/2011	4:39:23 PM	H2 valve closed
1/18/2011	4:39:23 PM	BCl3 valve closed
1/18/2011	4:39:23 PM	PH3 valve closed
1/18/2011	4:39:23 PM	SiCl4 pre valve closed
1/18/2011	4:39:23 PM	SiCl4 post valve closed
1/18/2011	4:39:23 PM	Bubbler valve closed
1/18/2011	4:39:23 PM	Main Vac valve opened
1/18/2011	4:39:23 PM	Bypass valve opened
1/18/2011	4:39:23 PM	Helium MFC set to  0.000000
1/18/2011	4:39:23 PM	H2 MFC set to  0.000000
1/18/2011	4:39:23 PM	BCl3 MFC set to  0.000000
1/18/2011	4:39:23 PM	PHl3 MFC set to  0.000000
1/18/2011	4:39:23 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:39:23 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:39:24 PM	Tube furnace set to 0
1/18/2011	4:40:24 PM	H2 valve closed
1/18/2011	4:40:24 PM	BCl3 valve closed
1/18/2011	4:40:24 PM	PH3 valve closed
1/18/2011	4:40:24 PM	SiCl4 pre valve closed
1/18/2011	4:40:24 PM	SiCl4 post valve closed
1/18/2011	4:40:24 PM	Bubbler valve closed
1/18/2011	4:40:24 PM	Helium valve opened
1/18/2011	4:40:24 PM	Main Vac valve opened
1/18/2011	4:40:24 PM	Bypass valve opened
1/18/2011	4:40:24 PM	Helium MFC set to  100.000000
1/18/2011	4:40:24 PM	H2 MFC set to  0.000000
1/18/2011	4:40:24 PM	BCl3 MFC set to  0.000000
1/18/2011	4:40:24 PM	PHl3 MFC set to  0.000000
1/18/2011	4:40:24 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:40:24 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:40:24 PM	Tube furnace set to 0
1/18/2011	4:41:24 PM	Helium valve closed
1/18/2011	4:41:24 PM	H2 valve closed
1/18/2011	4:41:24 PM	BCl3 valve closed
1/18/2011	4:41:24 PM	PH3 valve closed
1/18/2011	4:41:24 PM	SiCl4 pre valve closed
1/18/2011	4:41:24 PM	SiCl4 post valve closed
1/18/2011	4:41:24 PM	Bubbler valve closed
1/18/2011	4:41:24 PM	Main Vac valve opened
1/18/2011	4:41:24 PM	Bypass valve opened
1/18/2011	4:41:24 PM	Helium MFC set to  0.000000
1/18/2011	4:41:24 PM	H2 MFC set to  0.000000
1/18/2011	4:41:24 PM	BCl3 MFC set to  0.000000
1/18/2011	4:41:24 PM	PHl3 MFC set to  0.000000
1/18/2011	4:41:24 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:41:24 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:41:24 PM	Tube furnace set to 0
1/18/2011	4:42:24 PM	H2 valve closed
1/18/2011	4:42:24 PM	BCl3 valve closed
1/18/2011	4:42:24 PM	PH3 valve closed
1/18/2011	4:42:24 PM	SiCl4 pre valve closed
1/18/2011	4:42:24 PM	SiCl4 post valve closed
1/18/2011	4:42:24 PM	Bubbler valve closed
1/18/2011	4:42:24 PM	Helium valve opened
1/18/2011	4:42:24 PM	Main Vac valve opened
1/18/2011	4:42:24 PM	Bypass valve opened
1/18/2011	4:42:24 PM	Helium MFC set to  100.000000
1/18/2011	4:42:24 PM	H2 MFC set to  0.000000
1/18/2011	4:42:24 PM	BCl3 MFC set to  0.000000
1/18/2011	4:42:24 PM	PHl3 MFC set to  0.000000
1/18/2011	4:42:24 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:42:24 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:42:24 PM	Tube furnace set to 0
1/18/2011	4:43:24 PM	Helium valve closed
1/18/2011	4:43:24 PM	H2 valve closed
1/18/2011	4:43:24 PM	BCl3 valve closed
1/18/2011	4:43:24 PM	PH3 valve closed
1/18/2011	4:43:24 PM	SiCl4 pre valve closed
1/18/2011	4:43:24 PM	SiCl4 post valve closed
1/18/2011	4:43:24 PM	Bubbler valve closed
1/18/2011	4:43:24 PM	Main Vac valve opened
1/18/2011	4:43:24 PM	Bypass valve opened
1/18/2011	4:43:24 PM	Helium MFC set to  0.000000
1/18/2011	4:43:24 PM	H2 MFC set to  0.000000
1/18/2011	4:43:24 PM	BCl3 MFC set to  0.000000
1/18/2011	4:43:24 PM	PHl3 MFC set to  0.000000
1/18/2011	4:43:24 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:43:24 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:43:24 PM	Tube furnace set to 0
1/18/2011	4:44:24 PM	H2 valve closed
1/18/2011	4:44:24 PM	BCl3 valve closed
1/18/2011	4:44:24 PM	PH3 valve closed
1/18/2011	4:44:24 PM	SiCl4 pre valve closed
1/18/2011	4:44:24 PM	SiCl4 post valve closed
1/18/2011	4:44:24 PM	Bubbler valve closed
1/18/2011	4:44:24 PM	Helium valve opened
1/18/2011	4:44:24 PM	Main Vac valve opened
1/18/2011	4:44:24 PM	Bypass valve opened
1/18/2011	4:44:24 PM	Helium MFC set to  100.000000
1/18/2011	4:44:24 PM	H2 MFC set to  0.000000
1/18/2011	4:44:24 PM	BCl3 MFC set to  0.000000
1/18/2011	4:44:24 PM	PHl3 MFC set to  0.000000
1/18/2011	4:44:24 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:44:24 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:44:25 PM	Tube furnace set to 0
1/18/2011	4:45:17 PM	Helium valve closed
1/18/2011	4:45:17 PM	H2 valve closed
1/18/2011	4:45:17 PM	BCl3 valve closed
1/18/2011	4:45:17 PM	PH3 valve closed
1/18/2011	4:45:17 PM	SiCl4 pre valve closed
1/18/2011	4:45:17 PM	SiCl4 post valve closed
1/18/2011	4:45:17 PM	Bubbler valve closed
1/18/2011	4:45:17 PM	Main Vac valve opened
1/18/2011	4:45:17 PM	Bypass valve opened
1/18/2011	4:45:17 PM	Helium MFC set to  0.000000
1/18/2011	4:45:17 PM	H2 MFC set to  0.000000
1/18/2011	4:45:17 PM	BCl3 MFC set to  0.000000
1/18/2011	4:45:17 PM	PHl3 MFC set to  0.000000
1/18/2011	4:45:17 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:45:17 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:45:17 PM	Tube furnace set to 0
1/18/2011	4:46:00 PM	Run aborted at 4:46 PM
1/18/2011	4:46:00 PM	Helium valve closed
1/18/2011	4:46:00 PM	H2 valve closed
1/18/2011	4:46:00 PM	BCl3 valve closed
1/18/2011	4:46:00 PM	PH3 valve closed
1/18/2011	4:46:00 PM	SiCl4 pre valve closed
1/18/2011	4:46:00 PM	SiCl4 post valve closed
1/18/2011	4:46:00 PM	Bypass valve closed
1/18/2011	4:46:00 PM	Main Vac valve closed
1/18/2011	4:46:00 PM	Bubbler valve closed
1/18/2011	4:46:00 PM	Helium MFC set to  0.000000
1/18/2011	4:46:00 PM	H2 MFC set to  0.000000
1/18/2011	4:46:00 PM	BCl3 MFC set to  0.000000
1/18/2011	4:46:00 PM	PHl3 MFC set to  0.000000
1/18/2011	4:46:00 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:46:01 PM	Tube furnace set to 0
1/18/2011	4:46:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/18/2011	4:46:09 PM	Bypass valve opened
1/18/2011	4:46:09 PM	Main Vac valve opened
1/18/2011	4:46:22 PM	Recipe started at 4:46 PM
1/18/2011	4:46:22 PM	Helium valve closed
1/18/2011	4:46:22 PM	BCl3 valve closed
1/18/2011	4:46:22 PM	PH3 valve closed
1/18/2011	4:46:22 PM	SiCl4 pre valve closed
1/18/2011	4:46:22 PM	SiCl4 post valve closed
1/18/2011	4:46:22 PM	Main Vac valve closed
1/18/2011	4:46:22 PM	Bypass valve closed
1/18/2011	4:46:22 PM	Bubbler valve closed
1/18/2011	4:46:22 PM	H2 valve opened
1/18/2011	4:46:22 PM	Helium MFC set to  0.000000
1/18/2011	4:46:22 PM	H2 MFC set to  500.000000
1/18/2011	4:46:22 PM	BCl3 MFC set to  0.000000
1/18/2011	4:46:22 PM	PHl3 MFC set to  0.000000
1/18/2011	4:46:22 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:46:22 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:46:22 PM	Tube furnace set to 0
1/18/2011	4:47:41 PM	Helium valve closed
1/18/2011	4:47:41 PM	BCl3 valve closed
1/18/2011	4:47:41 PM	PH3 valve closed
1/18/2011	4:47:41 PM	SiCl4 pre valve closed
1/18/2011	4:47:41 PM	SiCl4 post valve closed
1/18/2011	4:47:41 PM	Main Vac valve closed
1/18/2011	4:47:41 PM	Bypass valve closed
1/18/2011	4:47:41 PM	H2 valve opened
1/18/2011	4:47:41 PM	Bubbler valve opened
1/18/2011	4:47:41 PM	Helium MFC set to  0.000000
1/18/2011	4:47:41 PM	H2 MFC set to  500.000000
1/18/2011	4:47:41 PM	BCl3 MFC set to  0.000000
1/18/2011	4:47:41 PM	PHl3 MFC set to  0.000000
1/18/2011	4:47:41 PM	SiCl4 MFC set to  0.000000
1/18/2011	4:47:41 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	4:47:41 PM	Tube furnace set to 1000
1/18/2011	5:07:41 PM	Helium valve closed
1/18/2011	5:07:41 PM	PH3 valve closed
1/18/2011	5:07:41 PM	Main Vac valve closed
1/18/2011	5:07:41 PM	Bypass valve closed
1/18/2011	5:07:41 PM	H2 valve opened
1/18/2011	5:07:41 PM	BCl3 valve opened
1/18/2011	5:07:41 PM	SiCl4 pre valve opened
1/18/2011	5:07:41 PM	SiCl4 post valve opened
1/18/2011	5:07:41 PM	Bubbler valve opened
1/18/2011	5:07:41 PM	Helium MFC set to  0.000000
1/18/2011	5:07:41 PM	H2 MFC set to  500.000000
1/18/2011	5:07:41 PM	BCl3 MFC set to  2.000000
1/18/2011	5:07:41 PM	PHl3 MFC set to  0.000000
1/18/2011	5:07:41 PM	SiCl4 MFC set to  50.000000
1/18/2011	5:07:41 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:07:41 PM	Tube furnace set to 1000
1/18/2011	5:27:41 PM	H2 valve closed
1/18/2011	5:27:41 PM	BCl3 valve closed
1/18/2011	5:27:41 PM	PH3 valve closed
1/18/2011	5:27:41 PM	SiCl4 pre valve closed
1/18/2011	5:27:41 PM	SiCl4 post valve closed
1/18/2011	5:27:41 PM	Main Vac valve closed
1/18/2011	5:27:41 PM	Bypass valve closed
1/18/2011	5:27:41 PM	Helium valve opened
1/18/2011	5:27:41 PM	Bubbler valve opened
1/18/2011	5:27:41 PM	Helium MFC set to  500.000000
1/18/2011	5:27:41 PM	H2 MFC set to  0.000000
1/18/2011	5:27:41 PM	BCl3 MFC set to  0.000000
1/18/2011	5:27:41 PM	PHl3 MFC set to  0.000000
1/18/2011	5:27:41 PM	SiCl4 MFC set to  0.000000
1/18/2011	5:27:41 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:27:41 PM	Tube furnace set to 950
1/18/2011	5:32:41 PM	H2 valve closed
1/18/2011	5:32:41 PM	BCl3 valve closed
1/18/2011	5:32:41 PM	PH3 valve closed
1/18/2011	5:32:41 PM	SiCl4 pre valve closed
1/18/2011	5:32:41 PM	SiCl4 post valve closed
1/18/2011	5:32:41 PM	Main Vac valve closed
1/18/2011	5:32:41 PM	Bypass valve closed
1/18/2011	5:32:41 PM	Helium valve opened
1/18/2011	5:32:41 PM	Bubbler valve opened
1/18/2011	5:32:41 PM	Helium MFC set to  500.000000
1/18/2011	5:32:41 PM	H2 MFC set to  0.000000
1/18/2011	5:32:41 PM	BCl3 MFC set to  0.000000
1/18/2011	5:32:41 PM	PHl3 MFC set to  0.000000
1/18/2011	5:32:41 PM	SiCl4 MFC set to  0.000000
1/18/2011	5:32:41 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:32:42 PM	Tube furnace set to 900
1/18/2011	5:37:42 PM	H2 valve closed
1/18/2011	5:37:42 PM	BCl3 valve closed
1/18/2011	5:37:42 PM	PH3 valve closed
1/18/2011	5:37:42 PM	SiCl4 pre valve closed
1/18/2011	5:37:42 PM	SiCl4 post valve closed
1/18/2011	5:37:42 PM	Main Vac valve closed
1/18/2011	5:37:42 PM	Bypass valve closed
1/18/2011	5:37:42 PM	Helium valve opened
1/18/2011	5:37:42 PM	Bubbler valve opened
1/18/2011	5:37:42 PM	Helium MFC set to  500.000000
1/18/2011	5:37:42 PM	H2 MFC set to  0.000000
1/18/2011	5:37:42 PM	BCl3 MFC set to  0.000000
1/18/2011	5:37:42 PM	PHl3 MFC set to  0.000000
1/18/2011	5:37:42 PM	SiCl4 MFC set to  0.000000
1/18/2011	5:37:42 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:37:42 PM	Tube furnace set to 850
1/18/2011	5:42:42 PM	H2 valve closed
1/18/2011	5:42:42 PM	BCl3 valve closed
1/18/2011	5:42:42 PM	PH3 valve closed
1/18/2011	5:42:42 PM	SiCl4 pre valve closed
1/18/2011	5:42:42 PM	SiCl4 post valve closed
1/18/2011	5:42:42 PM	Main Vac valve closed
1/18/2011	5:42:42 PM	Bypass valve closed
1/18/2011	5:42:42 PM	Helium valve opened
1/18/2011	5:42:42 PM	Bubbler valve opened
1/18/2011	5:42:42 PM	Helium MFC set to  500.000000
1/18/2011	5:42:42 PM	H2 MFC set to  0.000000
1/18/2011	5:42:42 PM	BCl3 MFC set to  0.000000
1/18/2011	5:42:42 PM	PHl3 MFC set to  0.000000
1/18/2011	5:42:42 PM	SiCl4 MFC set to  0.000000
1/18/2011	5:42:42 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:42:42 PM	Tube furnace set to 800
1/18/2011	5:47:42 PM	H2 valve closed
1/18/2011	5:47:42 PM	BCl3 valve closed
1/18/2011	5:47:42 PM	PH3 valve closed
1/18/2011	5:47:42 PM	SiCl4 pre valve closed
1/18/2011	5:47:42 PM	SiCl4 post valve closed
1/18/2011	5:47:42 PM	Main Vac valve closed
1/18/2011	5:47:42 PM	Bypass valve closed
1/18/2011	5:47:42 PM	Helium valve opened
1/18/2011	5:47:42 PM	Bubbler valve opened
1/18/2011	5:47:42 PM	Helium MFC set to  500.000000
1/18/2011	5:47:42 PM	H2 MFC set to  0.000000
1/18/2011	5:47:42 PM	BCl3 MFC set to  0.000000
1/18/2011	5:47:42 PM	PHl3 MFC set to  0.000000
1/18/2011	5:47:42 PM	SiCl4 MFC set to  0.000000
1/18/2011	5:47:42 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:47:42 PM	Tube furnace set to 750
1/18/2011	5:52:42 PM	H2 valve closed
1/18/2011	5:52:42 PM	BCl3 valve closed
1/18/2011	5:52:42 PM	PH3 valve closed
1/18/2011	5:52:42 PM	SiCl4 pre valve closed
1/18/2011	5:52:42 PM	SiCl4 post valve closed
1/18/2011	5:52:42 PM	Main Vac valve closed
1/18/2011	5:52:42 PM	Bypass valve closed
1/18/2011	5:52:42 PM	Helium valve opened
1/18/2011	5:52:42 PM	Bubbler valve opened
1/18/2011	5:52:42 PM	Helium MFC set to  500.000000
1/18/2011	5:52:42 PM	H2 MFC set to  0.000000
1/18/2011	5:52:42 PM	BCl3 MFC set to  0.000000
1/18/2011	5:52:42 PM	PHl3 MFC set to  0.000000
1/18/2011	5:52:42 PM	SiCl4 MFC set to  0.000000
1/18/2011	5:52:42 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:52:42 PM	Tube furnace set to 700
1/18/2011	5:57:42 PM	H2 valve closed
1/18/2011	5:57:42 PM	BCl3 valve closed
1/18/2011	5:57:42 PM	PH3 valve closed
1/18/2011	5:57:42 PM	SiCl4 pre valve closed
1/18/2011	5:57:42 PM	SiCl4 post valve closed
1/18/2011	5:57:42 PM	Main Vac valve closed
1/18/2011	5:57:42 PM	Bypass valve closed
1/18/2011	5:57:42 PM	Helium valve opened
1/18/2011	5:57:42 PM	Bubbler valve opened
1/18/2011	5:57:42 PM	Helium MFC set to  500.000000
1/18/2011	5:57:42 PM	H2 MFC set to  0.000000
1/18/2011	5:57:42 PM	BCl3 MFC set to  0.000000
1/18/2011	5:57:42 PM	PHl3 MFC set to  0.000000
1/18/2011	5:57:42 PM	SiCl4 MFC set to  0.000000
1/18/2011	5:57:42 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	5:57:42 PM	Tube furnace set to 0
1/18/2011	6:11:08 PM	Run aborted at 6:11 PM
1/18/2011	6:11:08 PM	Helium valve closed
1/18/2011	6:11:08 PM	H2 valve closed
1/18/2011	6:11:08 PM	BCl3 valve closed
1/18/2011	6:11:08 PM	PH3 valve closed
1/18/2011	6:11:08 PM	SiCl4 pre valve closed
1/18/2011	6:11:08 PM	SiCl4 post valve closed
1/18/2011	6:11:08 PM	Bypass valve closed
1/18/2011	6:11:08 PM	Main Vac valve closed
1/18/2011	6:11:08 PM	Bubbler valve closed
1/18/2011	6:11:08 PM	Helium MFC set to  0.000000
1/18/2011	6:11:08 PM	H2 MFC set to  0.000000
1/18/2011	6:11:08 PM	BCl3 MFC set to  0.000000
1/18/2011	6:11:08 PM	PHl3 MFC set to  0.000000
1/18/2011	6:11:08 PM	SiCl4 MFC set to  0.000000
1/18/2011	6:11:08 PM	Tube furnace set to 0
1/18/2011	6:11:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/18/2011	6:11:13 PM	Recipe started at 6:11 PM
1/18/2011	6:11:13 PM	H2 valve closed
1/18/2011	6:11:13 PM	BCl3 valve closed
1/18/2011	6:11:13 PM	PH3 valve closed
1/18/2011	6:11:13 PM	SiCl4 pre valve closed
1/18/2011	6:11:13 PM	SiCl4 post valve closed
1/18/2011	6:11:13 PM	Main Vac valve closed
1/18/2011	6:11:13 PM	Bypass valve closed
1/18/2011	6:11:13 PM	Bubbler valve closed
1/18/2011	6:11:13 PM	Helium valve opened
1/18/2011	6:11:13 PM	Helium MFC set to  500.000000
1/18/2011	6:11:13 PM	H2 MFC set to  0.000000
1/18/2011	6:11:13 PM	BCl3 MFC set to  0.000000
1/18/2011	6:11:13 PM	PHl3 MFC set to  0.000000
1/18/2011	6:11:13 PM	SiCl4 MFC set to  0.000000
1/18/2011	6:11:13 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	6:11:13 PM	Tube furnace set to 0
1/18/2011	6:11:14 PM	Helium valve closed
1/18/2011	6:11:14 PM	H2 valve closed
1/18/2011	6:11:14 PM	BCl3 valve closed
1/18/2011	6:11:14 PM	PH3 valve closed
1/18/2011	6:11:14 PM	SiCl4 pre valve closed
1/18/2011	6:11:14 PM	SiCl4 post valve closed
1/18/2011	6:11:14 PM	Main Vac valve closed
1/18/2011	6:11:14 PM	Bypass valve closed
1/18/2011	6:11:14 PM	Bubbler valve closed
1/18/2011	6:11:14 PM	Helium MFC set to  0.000000
1/18/2011	6:11:14 PM	H2 MFC set to  0.000000
1/18/2011	6:11:14 PM	BCl3 MFC set to  0.000000
1/18/2011	6:11:14 PM	PHl3 MFC set to  0.000000
1/18/2011	6:11:14 PM	SiCl4 MFC set to  0.000000
1/18/2011	6:11:14 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	6:11:14 PM	Tube furnace set to 0
1/18/2011	6:11:14 PM	Run finished at 6:11 PM
1/18/2011	6:11:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/18/2011	6:13:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/18/2011	6:13:13 PM	Recipe started at 6:13 PM
1/18/2011	6:13:13 PM	Helium valve closed
1/18/2011	6:13:13 PM	H2 valve closed
1/18/2011	6:13:13 PM	BCl3 valve closed
1/18/2011	6:13:13 PM	PH3 valve closed
1/18/2011	6:13:13 PM	SiCl4 pre valve closed
1/18/2011	6:13:13 PM	SiCl4 post valve closed
1/18/2011	6:13:13 PM	Main Vac valve closed
1/18/2011	6:13:13 PM	Bubbler valve closed
1/18/2011	6:13:13 PM	Bypass valve opened
1/18/2011	6:13:13 PM	Helium MFC set to  0.000000
1/18/2011	6:13:13 PM	H2 MFC set to  0.000000
1/18/2011	6:13:13 PM	BCl3 MFC set to  0.000000
1/18/2011	6:13:13 PM	PHl3 MFC set to  0.000000
1/18/2011	6:13:13 PM	SiCl4 MFC set to  0.000000
1/18/2011	6:13:13 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	6:13:13 PM	Tube furnace set to 0
1/18/2011	6:13:42 PM	Helium valve closed
1/18/2011	6:13:42 PM	H2 valve closed
1/18/2011	6:13:42 PM	BCl3 valve closed
1/18/2011	6:13:42 PM	PH3 valve closed
1/18/2011	6:13:42 PM	SiCl4 pre valve closed
1/18/2011	6:13:42 PM	SiCl4 post valve closed
1/18/2011	6:13:42 PM	Bubbler valve closed
1/18/2011	6:13:42 PM	Main Vac valve opened
1/18/2011	6:13:42 PM	Bypass valve opened
1/18/2011	6:13:42 PM	Helium MFC set to  0.000000
1/18/2011	6:13:42 PM	H2 MFC set to  0.000000
1/18/2011	6:13:42 PM	BCl3 MFC set to  0.000000
1/18/2011	6:13:42 PM	PHl3 MFC set to  0.000000
1/18/2011	6:13:42 PM	SiCl4 MFC set to  0.000000
1/18/2011	6:13:42 PM	Bypass solenoid MFC set to  0.000000
1/18/2011	6:13:42 PM	Tube furnace set to 0
1/18/2011	6:13:43 PM	Run finished at 6:13 PM
1/18/2011	6:13:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
